Deposition of functional coatings in the microwave waveguide by the magnetrons sputtering

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00450986" target="_blank" >RIV/68378271:_____/14:00450986 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Deposition of functional coatings in the microwave waveguide by the magnetrons sputtering

Popis výsledku v původním jazyce

The quality of microwave waveguide components is determined by the electrical properties of the thin sub-surface layer of the waveguide inner walls. In this work we present a deposition apparatus for coating of inner walls of the waveguide components. This apparatus uses principles of magnetron sputtering method. Nevertheless, the design ofthe apparatus has been significantly modified because of low transverse dimensions and significant length of the waveguide. For experiments, we used waveguides for band 8.2 to 12.4 GHz with cross-section dimensions 10.2 x 22.9 mm 2 and length 250 mm. The inner walls of the waveguide were coated by 1 um of silver layer. The thickness uniformity of the coating was controlled by continuous movement of the magnetic fieldalong the waveguide. The deposition rate was estimated from the coating thickness on the ?witness silicon substrate placed inside the waveguide during the sputtering process.

Název v anglickém jazyce

Deposition of functional coatings in the microwave waveguide by the magnetrons sputtering

Popis výsledku anglicky

The quality of microwave waveguide components is determined by the electrical properties of the thin sub-surface layer of the waveguide inner walls. In this work we present a deposition apparatus for coating of inner walls of the waveguide components. This apparatus uses principles of magnetron sputtering method. Nevertheless, the design ofthe apparatus has been significantly modified because of low transverse dimensions and significant length of the waveguide. For experiments, we used waveguides for band 8.2 to 12.4 GHz with cross-section dimensions 10.2 x 22.9 mm 2 and length 250 mm. The inner walls of the waveguide were coated by 1 um of silver layer. The thickness uniformity of the coating was controlled by continuous movement of the magnetic fieldalong the waveguide. The deposition rate was estimated from the coating thickness on the ?witness silicon substrate placed inside the waveguide during the sputtering process.

Druh

O - Ostatní výsledky

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

<a href="/cs/project/TA03010490" target="_blank" >TA03010490: Precizní multifunkční vrstvy ve vakuových a mikrovlnných systémech</a><br>

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2014

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů