A modified Katsumata probe - ion sensitive probe for measurement in non-magnetized plasmas
Identifikátory výsledku
Kód výsledku v IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F15%3A00449224" target="_blank" >RIV/68378271:_____/15:00449224 - isvavai.cz</a>
Nalezeny alternativní kódy
RIV/61389021:_____/15:00449224
Výsledek na webu
<a href="http://dx.doi.org/10.1063/1.4927169" target="_blank" >http://dx.doi.org/10.1063/1.4927169</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/1.4927169" target="_blank" >10.1063/1.4927169</a>
Alternativní jazyky
Jazyk výsledku
angličtina
Název v původním jazyce
A modified Katsumata probe - ion sensitive probe for measurement in non-magnetized plasmas
Popis výsledku v původním jazyce
A modified Katsumata probe has been developed for measurement of ion velocity distribution function (IVDF) in technological non-magnetized plasmas. A comparative study regarding IVDF measurement in a high power impulse magnetron sputtering system operating in pure argon atmosphere by means of developed modified Katsumata probe and commercially available gridded retarding field analyzer (RFA) has been carried out. A time-resolved measurement of IVDF for two different pressures whilst other plasma conditions have been kept unchanged has revealed that the main advantage of the modified Katsumata probe compared to the RFA consists in significantly smaller angular aperture of entrance orifice of modified Katsumata probe being approximately 15 in comparisonwith a commercial RFA having angular aperture more than 160. It leads in much better velocity resolution in measured IVDF since the transversal part of velocity vector is much more suppressed compared to RFA.
Název v anglickém jazyce
A modified Katsumata probe - ion sensitive probe for measurement in non-magnetized plasmas
Popis výsledku anglicky
A modified Katsumata probe has been developed for measurement of ion velocity distribution function (IVDF) in technological non-magnetized plasmas. A comparative study regarding IVDF measurement in a high power impulse magnetron sputtering system operating in pure argon atmosphere by means of developed modified Katsumata probe and commercially available gridded retarding field analyzer (RFA) has been carried out. A time-resolved measurement of IVDF for two different pressures whilst other plasma conditions have been kept unchanged has revealed that the main advantage of the modified Katsumata probe compared to the RFA consists in significantly smaller angular aperture of entrance orifice of modified Katsumata probe being approximately 15 in comparisonwith a commercial RFA having angular aperture more than 160. It leads in much better velocity resolution in measured IVDF since the transversal part of velocity vector is much more suppressed compared to RFA.
Klasifikace
Druh
J<sub>x</sub> - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
CEP obor
BL - Fyzika plasmatu a výboje v plynech
OECD FORD obor
—
Návaznosti výsledku
Projekt
<a href="/cs/project/LH12043" target="_blank" >LH12043: Výzkum tenkých vrstev na bázi FeS2 pro fotonické aplikace</a><br>
Návaznosti
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Ostatní
Rok uplatnění
2015
Kód důvěrnosti údajů
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Údaje specifické pro druh výsledku
Název periodika
Review of Scientific Instruments
ISSN
0034-6748
e-ISSN
—
Svazek periodika
86
Číslo periodika v rámci svazku
7
Stát vydavatele periodika
US - Spojené státy americké
Počet stran výsledku
7
Strana od-do
"073510-1"-"073510-7"
Kód UT WoS článku
000358934400048
EID výsledku v databázi Scopus
2-s2.0-84937501327