A novel method combining Monte Carlo-FEM simulations and experiments for simultaneous evaluation of the ultrathin film mass density and Young's modulus

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F16%3A00465143" target="_blank" >RIV/68378271:_____/16:00465143 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/61388998:_____/16:00465143 RIV/61989100:27230/16:86094788 RIV/61989100:27740/16:86094788

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.ymssp.2015.06.022" target="_blank" >http://dx.doi.org/10.1016/j.ymssp.2015.06.022</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.ymssp.2015.06.022" target="_blank" >10.1016/j.ymssp.2015.06.022</a>

Jazyk výsledku

angličtina

Název v původním jazyce

A novel method combining Monte Carlo-FEM simulations and experiments for simultaneous evaluation of the ultrathin film mass density and Young's modulus

Popis výsledku v původním jazyce

In this paper, a novel procedure of simultaneous measurement of the ultrathin film volumetric density and the Young`s modulus utilizing the Monte Carlo probabilistic method combined with the finite-element method (FEM) and the experiments carried out on the suspended micro-/nanomechanical resonator with a deposited thin film under different but controllable axial prestresses is proposed and analyzed. Since the procedure requires detection of only two bending fundamental resonant frequencies of a beam under different axial prestress forces, the impacts of noise and damping on accuracy of the results are minimized and thus it essentially improves its reliability. Then the volumetric mass density and the Young`s modulus of thin film are evaluated by means of the FEM based computational simulations and the accuracies of the determined values are estimated utilizing the Monte Carlo probabilistic method which has been incorporated into the computational procedure.

Název v anglickém jazyce

A novel method combining Monte Carlo-FEM simulations and experiments for simultaneous evaluation of the ultrathin film mass density and Young's modulus

Popis výsledku anglicky

In this paper, a novel procedure of simultaneous measurement of the ultrathin film volumetric density and the Young`s modulus utilizing the Monte Carlo probabilistic method combined with the finite-element method (FEM) and the experiments carried out on the suspended micro-/nanomechanical resonator with a deposited thin film under different but controllable axial prestresses is proposed and analyzed. Since the procedure requires detection of only two bending fundamental resonant frequencies of a beam under different axial prestress forces, the impacts of noise and damping on accuracy of the results are minimized and thus it essentially improves its reliability. Then the volumetric mass density and the Young`s modulus of thin film are evaluated by means of the FEM based computational simulations and the accuracies of the determined values are estimated utilizing the Monte Carlo probabilistic method which has been incorporated into the computational procedure.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BI - Akustika a kmity

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2016

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Mechanical Systems and Signal Processing

ISSN

0888-3270

e-ISSN

—

Svazek periodika

66-67

Číslo periodika v rámci svazku

January

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

9

Strana od-do

223-231

Kód UT WoS článku

000362861700014

EID výsledku v databázi Scopus

2-s2.0-84955513614