Fabrication of 2D periodic structures patterned on 3D surfaces by laser lithography

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F17%3A00483207" target="_blank" >RIV/68378271:_____/17:00483207 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Fabrication of 2D periodic structures patterned on 3D surfaces by laser lithography

Popis výsledku v původním jazyce

We prepared structures on two different surfaces: GaP cones grown by MOVPE and polycrystalline diamond films were deposited on Si using MWCVD. For the photoresist deposition we used technique of standard spin-coating deposition and deposition from water level. Quality of prepared structures were examined by confocal laser microscope and SEM. GaP microcones grown by MOVPE were formed on substrate and were patterned by interference laser lithography. Different 2D structures were patterned in the GaP microcones surfaces. Similar technique was used for 2D structure fabrication on diamond . Uniformity of diamond surface strongly depended on the homogeneous photoresist layer deposition which was experimentally optimized using different photoresist deposition techniques. In the next process, the selective deposition of metal nanoparticles in the patterned surface is aimed. This should lead to uniformly distributed nanostructures on 3D surfaces for plasmonic or SERS applications.

Název v anglickém jazyce

Fabrication of 2D periodic structures patterned on 3D surfaces by laser lithography

Popis výsledku anglicky

We prepared structures on two different surfaces: GaP cones grown by MOVPE and polycrystalline diamond films were deposited on Si using MWCVD. For the photoresist deposition we used technique of standard spin-coating deposition and deposition from water level. Quality of prepared structures were examined by confocal laser microscope and SEM. GaP microcones grown by MOVPE were formed on substrate and were patterned by interference laser lithography. Different 2D structures were patterned in the GaP microcones surfaces. Similar technique was used for 2D structure fabrication on diamond . Uniformity of diamond surface strongly depended on the homogeneous photoresist layer deposition which was experimentally optimized using different photoresist deposition techniques. In the next process, the selective deposition of metal nanoparticles in the patterned surface is aimed. This should lead to uniformly distributed nanostructures on 3D surfaces for plasmonic or SERS applications.

Druh

D - Stať ve sborníku

CEP obor

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OECD FORD obor

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Projekt

<a href="/cs/project/7AMB17AT036" target="_blank" >7AMB17AT036: Plasmonické biosenzory na bázi nanostruktur polykrystalického diamantu</a><br>

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2017

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Extended Abstract Book of international conference Progress in Applied Surface - SURFINT-SREN V

ISBN

978-80-2234411-1

ISSN

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e-ISSN

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Počet stran výsledku

2

Strana od-do

82-83

Název nakladatele

Comenius University

Místo vydání

Bratislava

Místo konání akce

Florence

Datum konání akce

20. 11. 2017

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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