Cathode voltage and discharge current oscillations in HiPIMS

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F17%3A00486975" target="_blank" >RIV/68378271:_____/17:00486975 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00216224:14310/17:00094725

Výsledek na webu

<a href="http://dx.doi.org/10.1088/1361-6595/aa62ee" target="_blank" >http://dx.doi.org/10.1088/1361-6595/aa62ee</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1361-6595/aa62ee" target="_blank" >10.1088/1361-6595/aa62ee</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Cathode voltage and discharge current oscillations in HiPIMS

Popis výsledku v původním jazyce

This paper reports on the oscillations both on the cathode voltage and on the discharge current which emerged suddenly and simultaneously during a. high- power impulse magnetron sputtering pulse. Detailed. experiments identified the pressure and the discharge current ranges to detect these oscillations. The oscillations. originated. from the magnetized plasma and their frequency ranged from 225 kHz to 400 kHz depending on the experimental conditions. Simultaneous measurement of both oscillations and spokes was conducted to find mutual correlations. The oscillations always accompanied the spokes and no particular conditions to detect oscillations in the. absence of. spokes were found. The oscillations were not caused by the rotational motion of the spokes but. emerged when a. certain threshold amount of spokes was overreached.

Název v anglickém jazyce

Cathode voltage and discharge current oscillations in HiPIMS

Popis výsledku anglicky

This paper reports on the oscillations both on the cathode voltage and on the discharge current which emerged suddenly and simultaneously during a. high- power impulse magnetron sputtering pulse. Detailed. experiments identified the pressure and the discharge current ranges to detect these oscillations. The oscillations. originated. from the magnetized plasma and their frequency ranged from 225 kHz to 400 kHz depending on the experimental conditions. Simultaneous measurement of both oscillations and spokes was conducted to find mutual correlations. The oscillations always accompanied the spokes and no particular conditions to detect oscillations in the. absence of. spokes were found. The oscillations were not caused by the rotational motion of the spokes but. emerged when a. certain threshold amount of spokes was overreached.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2017

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Plasma Sources Science & Technology

ISSN

0963-0252

e-ISSN

—

Svazek periodika

26

Číslo periodika v rámci svazku

5

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

12

Strana od-do

—

Kód UT WoS článku

000398394500002

EID výsledku v databázi Scopus

2-s2.0-85018343394