Crystalline thin layers of BaTiO3 for gas sensors prepared by PLD

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F18%3A00501097" target="_blank" >RIV/68378271:_____/18:00501097 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1007/978-94-024-1298-7_2" target="_blank" >http://dx.doi.org/10.1007/978-94-024-1298-7_2</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1007/978-94-024-1298-7_2" target="_blank" >10.1007/978-94-024-1298-7_2</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Crystalline thin layers of BaTiO3 for gas sensors prepared by PLD

Popis výsledku v původním jazyce

The synthesis of BaTiO3 thin films for gas detectors was studied. Thin layers of BaTiO3 (BTO) were deposited by pulsed laser deposition (PLD) on fused silica and Si (100) substrates using various deposition conditions from a sintered BaTiO3 target. The energy density of a KrF excimer laser was in the range from 2 to 6 Jcm 2. Films were deposited in an O2 ambient in the range from 10 3 to 10 Pa. The films were prepared at substrate temperatures ranging from 500 to 980 C. Polycrystalline BTO was obtained at substrate temperatures above 670 C. With increasing deposition temperature above 700 C the formation of the unwanted rutile phase prevented the growth of perovskite ferroelectric BTO. Concurrently, with decreasing substrate temperature below 670 C, amorphous films were formed. The layers was characterized by XRD spectroscopy and AFM microscopy. We optimized the depositions condition of the layers for chemical sensors.n

Název v anglickém jazyce

Crystalline thin layers of BaTiO3 for gas sensors prepared by PLD

Popis výsledku anglicky

The synthesis of BaTiO3 thin films for gas detectors was studied. Thin layers of BaTiO3 (BTO) were deposited by pulsed laser deposition (PLD) on fused silica and Si (100) substrates using various deposition conditions from a sintered BaTiO3 target. The energy density of a KrF excimer laser was in the range from 2 to 6 Jcm 2. Films were deposited in an O2 ambient in the range from 10 3 to 10 Pa. The films were prepared at substrate temperatures ranging from 500 to 980 C. Polycrystalline BTO was obtained at substrate temperatures above 670 C. With increasing deposition temperature above 700 C the formation of the unwanted rutile phase prevented the growth of perovskite ferroelectric BTO. Concurrently, with decreasing substrate temperature below 670 C, amorphous films were formed. The layers was characterized by XRD spectroscopy and AFM microscopy. We optimized the depositions condition of the layers for chemical sensors.n

Druh

C - Kapitola v odborné knize

CEP obor

—

OECD FORD obor

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Projekt

<a href="/cs/project/GA15-05864S" target="_blank" >GA15-05864S: Biokompatibilita dopovaných DLC vrstev připravených hybridní laserovou technologií</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2018

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název knihy nebo sborníku

Advanced nanotechnologies for detection and defence against CBRN agents

ISBN

978-9402412970

Počet stran výsledku

19

Strana od-do

17-30

Počet stran knihy

512

Název nakladatele

Springer International Edition

Místo vydání

Cham

Kód UT WoS kapitoly

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