Crystalline Thin Layers of BaTiO3 for Gas Sensors Prepared by PLD

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F18%3A00326990" target="_blank" >RIV/68407700:21340/18:00326990 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68407700:21460/18:00326990

Výsledek na webu

<a href="http://dx.doi.org/10.1007/978-94-024-1298-7_2" target="_blank" >http://dx.doi.org/10.1007/978-94-024-1298-7_2</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1007/978-94-024-1298-7_2" target="_blank" >10.1007/978-94-024-1298-7_2</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Crystalline Thin Layers of BaTiO3 for Gas Sensors Prepared by PLD

Popis výsledku v původním jazyce

The synthesis of BaTiO3thinfilms for gas detectors was studied. Thinlayers of BaTiO 3(BTO) were deposited by pulsed laser deposition (PLD) on fusedsilica and Si (100) substrates using various deposition conditions from a sinteredBaTiO3 target. The energy density of a KrF excimer laser was in the range from 2 to6 Jcm 2. Films were deposited in an O2ambient in the range from 103to 10 Pa.The films were prepared at substrate temperatures ranging from 500 to 980C.Polycrystalline BTO was obtained at substrate temperatures above 670 C. Withincreasing deposition temperature above 700C the formation of the unwanted rutilephase prevented the growth ofperovskite ferroelectric BTO. Concurrently, with decreasing substrate temperature below 670C, amorphousfilms were formed. The layers was characterized by XRD spectroscopy and AFM microscopy. We optimized the depositions condition of the layers for chemical sensors.

Název v anglickém jazyce

Crystalline Thin Layers of BaTiO3 for Gas Sensors Prepared by PLD

Popis výsledku anglicky

The synthesis of BaTiO3thinfilms for gas detectors was studied. Thinlayers of BaTiO 3(BTO) were deposited by pulsed laser deposition (PLD) on fusedsilica and Si (100) substrates using various deposition conditions from a sinteredBaTiO3 target. The energy density of a KrF excimer laser was in the range from 2 to6 Jcm 2. Films were deposited in an O2ambient in the range from 103to 10 Pa.The films were prepared at substrate temperatures ranging from 500 to 980C.Polycrystalline BTO was obtained at substrate temperatures above 670 C. Withincreasing deposition temperature above 700C the formation of the unwanted rutilephase prevented the growth ofperovskite ferroelectric BTO. Concurrently, with decreasing substrate temperature below 670C, amorphousfilms were formed. The layers was characterized by XRD spectroscopy and AFM microscopy. We optimized the depositions condition of the layers for chemical sensors.

Druh

C - Kapitola v odborné knize

CEP obor

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OECD FORD obor

20602 - Medical laboratory technology (including laboratory samples analysis; diagnostic technologies) (Biomaterials to be 2.9 [physical characteristics of living material as related to medical implants, devices, sensors])

Projekt

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Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2018

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název knihy nebo sborníku

Advanced Nanotechnologies for Detection and Defence against CBRN Agents

ISBN

978-94-024-1516-2

Počet stran výsledku

14

Strana od-do

17-30

Počet stran knihy

512

Název nakladatele

Springer Nature

Místo vydání

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Kód UT WoS kapitoly

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