Fabrication-tolerant and CMOS-compatible polarization splitter and rotator based on a compact bent-tapered directional coupler

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F20%3A00538976" target="_blank" >RIV/68378271:_____/20:00538976 - isvavai.cz</a>

Výsledek na webu

<a href="http://hdl.handle.net/11104/0316707" target="_blank" >http://hdl.handle.net/11104/0316707</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1063/5.0030638" target="_blank" >10.1063/5.0030638</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Fabrication-tolerant and CMOS-compatible polarization splitter and rotator based on a compact bent-tapered directional coupler

Popis výsledku v původním jazyce

In this paper, we demonstrate a broadband, low-loss, compact, and fabrication-tolerant polarization splitter and rotator (PSR) on a siliconon-insulator platform. The PSR is based on an asymmetric directional coupler (ADC), which is covered with SiO2 from the top to make it compatible with the standard metal back end of line (BEOL) process. Conventional ADC-based PSRs suffer from stringent fabrication requirements and relatively low bandwidth, while the proposed bent-tapered design is highly insensitive to the fabrication errors (>70 nm tolerance on the coupling gap) with an enlarged bandwidth and a compact footprint of 53 μm × 7 μm. It yields a polarization conversion loss less than 0.7 dB, a transverse electric (TE) insertion loss better than 0.3 dB, an ultra-low crosstalk with the TE extinction better than 30 dB, and the transverse magnetic extinction better than 25 dB, over a 200 nm wavelength range (1.5 μm–1.7 μm), in both ports. At the 1.55 μm wavelength, the calculated ultra-low polarization conversion loss and TE insertion loss are 0.27 dB and 0.08 dB, respectively.

Název v anglickém jazyce

Fabrication-tolerant and CMOS-compatible polarization splitter and rotator based on a compact bent-tapered directional coupler

Popis výsledku anglicky

In this paper, we demonstrate a broadband, low-loss, compact, and fabrication-tolerant polarization splitter and rotator (PSR) on a siliconon-insulator platform. The PSR is based on an asymmetric directional coupler (ADC), which is covered with SiO2 from the top to make it compatible with the standard metal back end of line (BEOL) process. Conventional ADC-based PSRs suffer from stringent fabrication requirements and relatively low bandwidth, while the proposed bent-tapered design is highly insensitive to the fabrication errors (>70 nm tolerance on the coupling gap) with an enlarged bandwidth and a compact footprint of 53 μm × 7 μm. It yields a polarization conversion loss less than 0.7 dB, a transverse electric (TE) insertion loss better than 0.3 dB, an ultra-low crosstalk with the TE extinction better than 30 dB, and the transverse magnetic extinction better than 25 dB, over a 200 nm wavelength range (1.5 μm–1.7 μm), in both ports. At the 1.55 μm wavelength, the calculated ultra-low polarization conversion loss and TE insertion loss are 0.27 dB and 0.08 dB, respectively.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

—

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2020

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

AIP Advances

ISSN

2158-3226

e-ISSN

—

Svazek periodika

10

Číslo periodika v rámci svazku

12

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

9

Strana od-do

1-9

Kód UT WoS článku

000598534600002

EID výsledku v databázi Scopus

2-s2.0-85097620897