Laser-assisted two-step glass wafer metallization: An experimental procedure to improve compatibility between glass and metallic films

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F23%3A00572409" target="_blank" >RIV/68378271:_____/23:00572409 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68407700:21220/23:00366029 RIV/00216208:11320/23:10467293

Výsledek na webu

<a href="https://doi.org/10.1016/j.apsusc.2023.157276" target="_blank" >https://doi.org/10.1016/j.apsusc.2023.157276</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.apsusc.2023.157276" target="_blank" >10.1016/j.apsusc.2023.157276</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Laser-assisted two-step glass wafer metallization: An experimental procedure to improve compatibility between glass and metallic films

Popis výsledku v původním jazyce

We report a simple and efficient two-step experimental procedure of glass metallization using laser microstructuring at ambient conditions. An adhesive pattern was created on the glass substrate using a laser, which imposes mechanical interlocking. An adhesive Cu layer was deposited on the glass substrate by magnetron sputtering and then electroplated with a functional Cu layer. Due to the unique surface structure created on the glass using laser, we achieved a thick layer of Cu metal film with high adhesion strength, well-defined grains and grain boundaries, and low surface roughness. The total thickness of the grown film was 11.4 µm, with an average surface roughness of 1.2 µm. The magnetron-sputtered coating did not show delamination from the glass substrate at a critical load of 60 N. The proposed method of glass metallization will lead to the realization of glass-based circuit materials that can be used in high-frequency electronic devices. Also, this procedure will be an alternative to chemical-based copper plating, which involves multiple processing steps and high-cost chemicals.

Název v anglickém jazyce

Laser-assisted two-step glass wafer metallization: An experimental procedure to improve compatibility between glass and metallic films

Popis výsledku anglicky

We report a simple and efficient two-step experimental procedure of glass metallization using laser microstructuring at ambient conditions. An adhesive pattern was created on the glass substrate using a laser, which imposes mechanical interlocking. An adhesive Cu layer was deposited on the glass substrate by magnetron sputtering and then electroplated with a functional Cu layer. Due to the unique surface structure created on the glass using laser, we achieved a thick layer of Cu metal film with high adhesion strength, well-defined grains and grain boundaries, and low surface roughness. The total thickness of the grown film was 11.4 µm, with an average surface roughness of 1.2 µm. The magnetron-sputtered coating did not show delamination from the glass substrate at a critical load of 60 N. The proposed method of glass metallization will lead to the realization of glass-based circuit materials that can be used in high-frequency electronic devices. Also, this procedure will be an alternative to chemical-based copper plating, which involves multiple processing steps and high-cost chemicals.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

<a href="/cs/project/EF15_006%2F0000674" target="_blank" >EF15_006/0000674: HiLASE Centre of Excellence</a><br>

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2023

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Applied Surface Science

ISSN

0169-4332

e-ISSN

1873-5584

Svazek periodika

627

Číslo periodika v rámci svazku

Aug.

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

7

Strana od-do

157276

Kód UT WoS článku

000988755400001

EID výsledku v databázi Scopus

2-s2.0-85153573521