Sensitive detection of Si3N4 thin-film defects via second harmonic generation microscopy

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F25%3A00619295" target="_blank" >RIV/68378271:_____/25:00619295 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/61389021:_____/25:00619295 RIV/46747885:24220/25:00012767

Výsledek na webu

<a href="https://opg.optica.org/ol/fulltext.cfm?uri=ol-50-6-1885&id=568913" target="_blank" >https://opg.optica.org/ol/fulltext.cfm?uri=ol-50-6-1885&id=568913</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1364/OL.553380" target="_blank" >10.1364/OL.553380</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Sensitive detection of Si3N4 thin-film defects via second harmonic generation microscopy

Popis výsledku v původním jazyce

Optical coating, an integral part of many optical systems, is prone to damage from environmental exposure and laser irradiation. This underscores the need for reliable and sensitive coating diagnostics. We introduce second harmonic generation (SHG) as a method for the sensitive detection of defects and inhomogeneities within optical thin films. We demonstrate the use of SHG on Si3N4 layers tested for their laser-induced damage threshold. The SHG mapping was compared with commonly used diagnostic techniques, including Nomarski microscopy, white light interferometry, and electron microscopy. Owing to its sensitivity to variations in local symmetry, SHG is able to discern minute alterations in material composition, mechanical stress, and interface structures. Therefore, SHG identified modifications in the tested layers, highly extending the damage recognized by standard methods. Furthermore, we demonstrate SHG’s ability to enhance specific features by modulation of incidence angles and polarization modes. Based on these findings, we propose SHG as an ideal diagnostic tool for the early identification of laser-induced modifications in centrosymmetric thin films.

Název v anglickém jazyce

Sensitive detection of Si3N4 thin-film defects via second harmonic generation microscopy

Popis výsledku anglicky

Optical coating, an integral part of many optical systems, is prone to damage from environmental exposure and laser irradiation. This underscores the need for reliable and sensitive coating diagnostics. We introduce second harmonic generation (SHG) as a method for the sensitive detection of defects and inhomogeneities within optical thin films. We demonstrate the use of SHG on Si3N4 layers tested for their laser-induced damage threshold. The SHG mapping was compared with commonly used diagnostic techniques, including Nomarski microscopy, white light interferometry, and electron microscopy. Owing to its sensitivity to variations in local symmetry, SHG is able to discern minute alterations in material composition, mechanical stress, and interface structures. Therefore, SHG identified modifications in the tested layers, highly extending the damage recognized by standard methods. Furthermore, we demonstrate SHG’s ability to enhance specific features by modulation of incidence angles and polarization modes. Based on these findings, we propose SHG as an ideal diagnostic tool for the early identification of laser-induced modifications in centrosymmetric thin films.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

<a href="/cs/project/EH22_008%2F0004573" target="_blank" >EH22_008/0004573: Průlomové laserové technologie pro chytrou výrobu, vesmírné a biotechnologické aplikace</a><br>

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2025

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Optics Letters

ISSN

0146-9592

e-ISSN

1539-4794

Svazek periodika

50

Číslo periodika v rámci svazku

6

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

4

Strana od-do

1885-1888

Kód UT WoS článku

001466470000001

EID výsledku v databázi Scopus

2-s2.0-105000238055