Infrared phonons in monoclinic Hf0.5Zr0.5O2 thin films

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F25%3A00642992" target="_blank" >RIV/68378271:_____/25:00642992 - isvavai.cz</a>

Výsledek na webu

<a href="https://hdl.handle.net/11104/0372838" target="_blank" >https://hdl.handle.net/11104/0372838</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1063/5.0297535" target="_blank" >10.1063/5.0297535</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Infrared phonons in monoclinic Hf0.5Zr0.5O2 thin films

Popis výsledku v původním jazyce

Infrared reflectance spectra of monoclinic Hf0.5Zr0.5O2 (HZO) films with thickness in the range of 10–90 nm deposited on different cuts of Al2O3 and yttria-stabilized zirconia (YSZ) substrates were measured in the frequency region 30–4000 cm-1. Several phonons belonging to HZO were observed even for the 10 nm films. X-ray diffraction measurements were used to determine the crystal structure of the films and their orientation with respect to the substrates. The phonon spectra of HZO films grown on the anisotropic (1-102) R-cut Al2O3 substrates exhibit strong anisotropy. Comparing them with the spectra of the films on isotropic YSZ substrates, it allows us to assign the symmetry and polarization of the phonons in HZO films. We also measured the IR reflectance of HfO2, ZrO2 and HZO ceramics and compared their phonon parameters with those of the corresponding thin films.

Název v anglickém jazyce

Infrared phonons in monoclinic Hf0.5Zr0.5O2 thin films

Popis výsledku anglicky

Infrared reflectance spectra of monoclinic Hf0.5Zr0.5O2 (HZO) films with thickness in the range of 10–90 nm deposited on different cuts of Al2O3 and yttria-stabilized zirconia (YSZ) substrates were measured in the frequency region 30–4000 cm-1. Several phonons belonging to HZO were observed even for the 10 nm films. X-ray diffraction measurements were used to determine the crystal structure of the films and their orientation with respect to the substrates. The phonon spectra of HZO films grown on the anisotropic (1-102) R-cut Al2O3 substrates exhibit strong anisotropy. Comparing them with the spectra of the films on isotropic YSZ substrates, it allows us to assign the symmetry and polarization of the phonons in HZO films. We also measured the IR reflectance of HfO2, ZrO2 and HZO ceramics and compared their phonon parameters with those of the corresponding thin films.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2025

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of Applied Physics

ISSN

0021-8979

e-ISSN

1089-7550

Svazek periodika

138

Číslo periodika v rámci svazku

21

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

11

Strana od-do

214101

Kód UT WoS článku

001631585200001

EID výsledku v databázi Scopus

2-s2.0-105023955163