Comparison of micro and macro scratch testing methods for adhesion and microhardness determination of thin films

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21220%2F11%3A00185457" target="_blank" >RIV/68407700:21220/11:00185457 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68407700:21460/11:00185457

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Comparison of micro and macro scratch testing methods for adhesion and microhardness determination of thin films

Popis výsledku v původním jazyce

In this work, we focused on the usability of scratch test technique for determination of thin films adhesion with the layer thicknesses around one hundred nanometres and less. For this study we prepared titanium dioxide and diamond-like-carbon thin filmsdeposited by Pulsed Laser Deposition technique. We tested microhardness and friction behaviour on the same samples. We tested adhesion properties by micro and macro scratch tests techniques on three different measurement instruments. We used macroscratch tester Revetest (CSM corp.), nanosclerometric extending atomic force microscope (AFM) head Solver Next (NT-MTD corp.), and Hysitron TI950 with nanoscratch transducer. We observed and compared abilities for the each individual instrument to evaluate adhesion of thin films with thickness of several tenths of nanometres. We were looking for advantages and disadvantages of these systems and methods.

Název v anglickém jazyce

Comparison of micro and macro scratch testing methods for adhesion and microhardness determination of thin films

Popis výsledku anglicky

In this work, we focused on the usability of scratch test technique for determination of thin films adhesion with the layer thicknesses around one hundred nanometres and less. For this study we prepared titanium dioxide and diamond-like-carbon thin filmsdeposited by Pulsed Laser Deposition technique. We tested microhardness and friction behaviour on the same samples. We tested adhesion properties by micro and macro scratch tests techniques on three different measurement instruments. We used macroscratch tester Revetest (CSM corp.), nanosclerometric extending atomic force microscope (AFM) head Solver Next (NT-MTD corp.), and Hysitron TI950 with nanoscratch transducer. We observed and compared abilities for the each individual instrument to evaluate adhesion of thin films with thickness of several tenths of nanometres. We were looking for advantages and disadvantages of these systems and methods.

Druh

O - Ostatní výsledky

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

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Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2011

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů