Application of micro and macro scratch tests measurement for testing of DLC and TiO2 thin films

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21220%2F12%3A00198212" target="_blank" >RIV/68407700:21220/12:00198212 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68407700:21460/12:00198212

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Application of micro and macro scratch tests measurement for testing of DLC and TiO2 thin films

Popis výsledku v původním jazyce

In this work, we focused on the usability of scratch test technique for determination of thin films adhesion with the layer thicknesses around 100 nanometres. Thin films of diamond-like carbon (DLC)(values of sp3 bonds from 40% to 70 %) and titanium dioxide (TiO2) (anatase, rutile) were prepared by Pulsed Laser Deposition (PLD). The basic substrates were silicon wafers Si(111) and titanium alloy. Thicknesses of prepared layers were in range of 60 nm to 100 nm for DLC and 100 nm to 140 nm for TiO2. Mechanical properties were tested using micro and macro methods. Microhardness was evaluated by AFM nanoindentation head Solver Next and Hysitron nanoindenter were used. Adhesion was measured using AFM head, Hysitron nanoindenter and CSM Revetester. For all samples (DLC, TiO2) the Young's moduli were determined also. We observed and compared abilities for the each individual instrument to evaluate adhesion of thin films with thickness of several tenths of nanometres. For the evaluation we use

Název v anglickém jazyce

Application of micro and macro scratch tests measurement for testing of DLC and TiO2 thin films

Popis výsledku anglicky

In this work, we focused on the usability of scratch test technique for determination of thin films adhesion with the layer thicknesses around 100 nanometres. Thin films of diamond-like carbon (DLC)(values of sp3 bonds from 40% to 70 %) and titanium dioxide (TiO2) (anatase, rutile) were prepared by Pulsed Laser Deposition (PLD). The basic substrates were silicon wafers Si(111) and titanium alloy. Thicknesses of prepared layers were in range of 60 nm to 100 nm for DLC and 100 nm to 140 nm for TiO2. Mechanical properties were tested using micro and macro methods. Microhardness was evaluated by AFM nanoindentation head Solver Next and Hysitron nanoindenter were used. Adhesion was measured using AFM head, Hysitron nanoindenter and CSM Revetester. For all samples (DLC, TiO2) the Young's moduli were determined also. We observed and compared abilities for the each individual instrument to evaluate adhesion of thin films with thickness of several tenths of nanometres. For the evaluation we use

Druh

O - Ostatní výsledky

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

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Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů