A hybrid approach to model and simulate the double-gimbaled MEMS-based micromirror

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

A hybrid approach to model and simulate the double-gimbaled MEMS-based micromirror

Popis výsledku v původním jazyce

In this paper, the hybrid approach to model and simulate the behavior of the double-gimbaled MEMS-based micrommiror is presented. The model of the micromirror is represented as a system of coupled equations and combines both the distributed and lumped parameter description. The advantage of the hybrid approach is improved accuracy of simulation results in comparison with the results obtained from pure lumped parameter models, and on other hand, the enormous reduction in simulation time in comparison with the models completely based on the distributed parameter description. The model involves electrostatics, solid mechanics and gas dynamics. Thus, the multiphysics interactions have to be considered and therefore they are discussed in the paper. The gas-damping is modeled by the finite element analysis (via squeeze-film damping effect), and thus, there is no need for the derivation of the analytical formula of the gas-damping.

Název v anglickém jazyce

A hybrid approach to model and simulate the double-gimbaled MEMS-based micromirror

Popis výsledku anglicky

In this paper, the hybrid approach to model and simulate the behavior of the double-gimbaled MEMS-based micrommiror is presented. The model of the micromirror is represented as a system of coupled equations and combines both the distributed and lumped parameter description. The advantage of the hybrid approach is improved accuracy of simulation results in comparison with the results obtained from pure lumped parameter models, and on other hand, the enormous reduction in simulation time in comparison with the models completely based on the distributed parameter description. The model involves electrostatics, solid mechanics and gas dynamics. Thus, the multiphysics interactions have to be considered and therefore they are discussed in the paper. The gas-damping is modeled by the finite element analysis (via squeeze-film damping effect), and thus, there is no need for the derivation of the analytical formula of the gas-damping.

Druh

D - Stať ve sborníku

CEP obor

IN - Informatika

OECD FORD obor

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Projekt

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Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2010

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of the 7th EUROSIM Congress on Modelling and Simulation, Vol. 2: Full Papers

ISBN

978-80-01-04589-3

ISSN

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e-ISSN

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Počet stran výsledku

7

Strana od-do

514-520

Název nakladatele

Department of Computer Science and Engineering, FEE, CTU in Prague

Místo vydání

Prague

Místo konání akce

Praha

Datum konání akce

6. 9. 2010

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

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