Gas-damped double-gimbaled electrostatic torsional micromirror modeling and simulation

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F12%3A00191002" target="_blank" >RIV/68407700:21230/12:00191002 - isvavai.cz</a>

Výsledek na webu

<a href="http://www.sciencedirect.com/science/article/pii/S1569190X11001444" target="_blank" >http://www.sciencedirect.com/science/article/pii/S1569190X11001444</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.simpat.2011.08.010" target="_blank" >10.1016/j.simpat.2011.08.010</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Gas-damped double-gimbaled electrostatic torsional micromirror modeling and simulation

Popis výsledku v původním jazyce

In this paper, the modeling and simulation of the gas-damped double-gimbaled electrostatic torsional micromirror are presented. The model is represented as a system of coupled equations, and combines both the distributed and lumped parameter description.It involves electrostatics, solid mechanics and gas dynamics.The bending effect of the micromirror suspensions is also considered. Based on the model, the micromirror behavior has been simulated and the simulation results are presented. The model is applicable for wide class of electrostatic MEMS actuators. Moreover, the great advantage of the presented model is enormous reduction in computational time in comparison with the model completely based on the finite element analysis.

Název v anglickém jazyce

Gas-damped double-gimbaled electrostatic torsional micromirror modeling and simulation

Popis výsledku anglicky

In this paper, the modeling and simulation of the gas-damped double-gimbaled electrostatic torsional micromirror are presented. The model is represented as a system of coupled equations, and combines both the distributed and lumped parameter description.It involves electrostatics, solid mechanics and gas dynamics.The bending effect of the micromirror suspensions is also considered. Based on the model, the micromirror behavior has been simulated and the simulation results are presented. The model is applicable for wide class of electrostatic MEMS actuators. Moreover, the great advantage of the presented model is enormous reduction in computational time in comparison with the model completely based on the finite element analysis.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

—

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Simulation Modelling Practice and Theory

ISSN

1569-190X

e-ISSN

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Svazek periodika

20

Číslo periodika v rámci svazku

1

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

11

Strana od-do

59-69

Kód UT WoS článku

000298533400005

EID výsledku v databázi Scopus

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