The evaluation of parameters of evaporated aluminium layers depending on initial conditions

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F17%3A00315616" target="_blank" >RIV/68407700:21230/17:00315616 - isvavai.cz</a>

Výsledek na webu

<a href="http://ieeexplore.ieee.org/document/8000954/" target="_blank" >http://ieeexplore.ieee.org/document/8000954/</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1109/ISSE.2017.8000954" target="_blank" >10.1109/ISSE.2017.8000954</a>

Jazyk výsledku

angličtina

Název v původním jazyce

The evaluation of parameters of evaporated aluminium layers depending on initial conditions

Popis výsledku v původním jazyce

This paper focuses to the problematic of thin film metal layers. The samples prepared by vacuum evaporation of thin film meander-shaped aluminium layers were analysed. Electrical resistance and thickness of layer were included in the measured parameters. We evaluated these parameters in dependence of the volume of the source material, i.e., an aluminium wire. We observed a certain variance in measured values in a repeated experiment with a constant amount of the originating material. Sets of measured values were processed by statistical methods, namely histogram and Shapiro-Wilk normality test. We observe some interesting facts from the analysed data that can give us information about the influence of the evaporation process on the resulting properties of the layer.

Název v anglickém jazyce

The evaluation of parameters of evaporated aluminium layers depending on initial conditions

Popis výsledku anglicky

This paper focuses to the problematic of thin film metal layers. The samples prepared by vacuum evaporation of thin film meander-shaped aluminium layers were analysed. Electrical resistance and thickness of layer were included in the measured parameters. We evaluated these parameters in dependence of the volume of the source material, i.e., an aluminium wire. We observed a certain variance in measured values in a repeated experiment with a constant amount of the originating material. Sets of measured values were processed by statistical methods, namely histogram and Shapiro-Wilk normality test. We observe some interesting facts from the analysed data that can give us information about the influence of the evaporation process on the resulting properties of the layer.

Druh

D - Stať ve sborníku

CEP obor

—

OECD FORD obor

20201 - Electrical and electronic engineering

Projekt

—

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2017

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

40th International Spring Seminar on Electronics Technology (ISSE)

ISBN

978-1-5386-0582-0

ISSN

2161-2536

e-ISSN

—

Počet stran výsledku

4

Strana od-do

—

Název nakladatele

IEEE

Místo vydání

New York

Místo konání akce

Sofia

Datum konání akce

10. 5. 2017

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

000426973000077