Measurement of nonlinear distortion of MEMS microphones

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F21%3A00344637" target="_blank" >RIV/68407700:21230/21:00344637 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68407700:21260/21:00344637

Výsledek na webu

<a href="https://doi.org/10.1016/j.apacoust.2020.107802" target="_blank" >https://doi.org/10.1016/j.apacoust.2020.107802</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.apacoust.2020.107802" target="_blank" >10.1016/j.apacoust.2020.107802</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Measurement of nonlinear distortion of MEMS microphones

Popis výsledku v původním jazyce

An experimental investigation on the nonlinear behaviour of the MEMS microphones is of rising interest as their use is growing rapidly not only in the domain of consumer audio devices but also in the measurement applications where higher precision is needed. The present work uses a recently published method allowing a distortionless harmonic excitation at high-pressure levels to measure and examine the distortion of single backplate MEMS microphones. The measured distortion is compared with the values predicted by a simple model of the nonlinearities originating in the electrostatic transduction principle. A good agreement between the predicted and the measured values of the second harmonic is shown. The level of the third harmonic is influenced by nonlinear effects not taken into account in the simple model and therefore deviates from the predicted values.

Název v anglickém jazyce

Measurement of nonlinear distortion of MEMS microphones

Popis výsledku anglicky

An experimental investigation on the nonlinear behaviour of the MEMS microphones is of rising interest as their use is growing rapidly not only in the domain of consumer audio devices but also in the measurement applications where higher precision is needed. The present work uses a recently published method allowing a distortionless harmonic excitation at high-pressure levels to measure and examine the distortion of single backplate MEMS microphones. The measured distortion is compared with the values predicted by a simple model of the nonlinearities originating in the electrostatic transduction principle. A good agreement between the predicted and the measured values of the second harmonic is shown. The level of the third harmonic is influenced by nonlinear effects not taken into account in the simple model and therefore deviates from the predicted values.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10307 - Acoustics

Projekt

—

Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2021

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Applied Acoustics

ISSN

0003-682X

e-ISSN

1872-910X

Svazek periodika

2021

Číslo periodika v rámci svazku

175

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

5

Strana od-do

—

Kód UT WoS článku

000613270700013

EID výsledku v databázi Scopus

2-s2.0-85097578915