Insight into high temperature performance of magnetron sputtered Si-Ta-C-(N) coatings with an ion-implanted interlayer

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F21%3A00348763" target="_blank" >RIV/68407700:21230/21:00348763 - isvavai.cz</a>

Výsledek na webu

<a href="https://doi.org/10.1016/j.apsusc.2020.148526" target="_blank" >https://doi.org/10.1016/j.apsusc.2020.148526</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.apsusc.2020.148526" target="_blank" >10.1016/j.apsusc.2020.148526</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Insight into high temperature performance of magnetron sputtered Si-Ta-C-(N) coatings with an ion-implanted interlayer

Popis výsledku v původním jazyce

Challenges related to the application of wear resistant coatings at high temperatures require the development of novel materials with an exceptional combination of mechanical, chemical and tribological properties. The present paper is focused on understanding of relationships between structure, composition and high-temperature performance of the Si-Ta-C-(N) coatings. The coatings were produced using combined magnetron sputtering (MS) and ion implantation (CMSII) technique. It was found that ion implanted coatings demonstrated better thermal shock resistance compared to MS Si Ta C (N) coatings. The Si-Ta-C-(N) coatings revealed a nanocomposite structure consisting of 2-3 nm fcc TaC(N) grains and amorphous a-Si and a-SiC(N) phases. The composition and structure of amorphous matrix and nanocrystallites strongly affected tribological performance of the Si-Ta-C-(N) coatings. The N-doped coatings exhibited exceptionally good tribological performance due to a higher ductility of N-rich amorphous a-SiCN and a-SiNx matrix, and fcc Ta(C,N)-based crystallites compared with the a-Si + a-SiC, and fcc TaC-based phases in N-free coating. The Si-Ta-C-(N) coatings easily withstood oxidation annealing at 800 degrees C due to the formation of a 200 nm protective TaSiOx amorphous layer. Oxidation annealings revealed that under thin protective TaSiOx layer crystalline components of coatings did not change when Si and C from the amorphous matrix started to diffuse towards the substrate at 800 degrees C but even after redistribution of elements and formation of oxide scale the coatings demonstrated reasonably high hardness - 13-16 GPa. Triboactivated formation of TaSiOx fibers which could slide/roll against the same TaSiOx tribolayer during high-temperature tribotests resulted in low coefficient of friction values (0.23 at 800 degrees C) and absence of wear.

Název v anglickém jazyce

Insight into high temperature performance of magnetron sputtered Si-Ta-C-(N) coatings with an ion-implanted interlayer

Popis výsledku anglicky

Challenges related to the application of wear resistant coatings at high temperatures require the development of novel materials with an exceptional combination of mechanical, chemical and tribological properties. The present paper is focused on understanding of relationships between structure, composition and high-temperature performance of the Si-Ta-C-(N) coatings. The coatings were produced using combined magnetron sputtering (MS) and ion implantation (CMSII) technique. It was found that ion implanted coatings demonstrated better thermal shock resistance compared to MS Si Ta C (N) coatings. The Si-Ta-C-(N) coatings revealed a nanocomposite structure consisting of 2-3 nm fcc TaC(N) grains and amorphous a-Si and a-SiC(N) phases. The composition and structure of amorphous matrix and nanocrystallites strongly affected tribological performance of the Si-Ta-C-(N) coatings. The N-doped coatings exhibited exceptionally good tribological performance due to a higher ductility of N-rich amorphous a-SiCN and a-SiNx matrix, and fcc Ta(C,N)-based crystallites compared with the a-Si + a-SiC, and fcc TaC-based phases in N-free coating. The Si-Ta-C-(N) coatings easily withstood oxidation annealing at 800 degrees C due to the formation of a 200 nm protective TaSiOx amorphous layer. Oxidation annealings revealed that under thin protective TaSiOx layer crystalline components of coatings did not change when Si and C from the amorphous matrix started to diffuse towards the substrate at 800 degrees C but even after redistribution of elements and formation of oxide scale the coatings demonstrated reasonably high hardness - 13-16 GPa. Triboactivated formation of TaSiOx fibers which could slide/roll against the same TaSiOx tribolayer during high-temperature tribotests resulted in low coefficient of friction values (0.23 at 800 degrees C) and absence of wear.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20506 - Coating and films

Projekt

<a href="/cs/project/EF16_026%2F0008396" target="_blank" >EF16_026/0008396: Nové nanostruktury pro inženýrské aplikace umožněné kombinací moderních technologií a pokročilých simulací</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2021

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Applied Surface Science

ISSN

0169-4332

e-ISSN

1873-5584

Svazek periodika

541

Číslo periodika v rámci svazku

March

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

11

Strana od-do

—

Kód UT WoS článku

000608509400005

EID výsledku v databázi Scopus

2-s2.0-85097074552