An interdisciplinary approach to the design of multiphysics mechatronic systems: The electrostatic actuator design case study

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

An interdisciplinary approach to the design of multiphysics mechatronic systems: The electrostatic actuator design case study

Popis výsledku v původním jazyce

Recent micro-electro-mechanical systems (MEMS) use various principles and phenomena in order to provide required functionality. Due to the interdisciplinary nature of such systems, their design is often a difficult and complex task requiring knowledge from multiple engineering fields. The main complexity in the design is to provide the system with the necessary abilities and to identify possible design drawbacks. In this paper, we demonstrate that the synergy of multiple engineering fields can be reached through the analysis of the designed system and its optimization. In presented case study, we consider an electrostatic parallel-plate actuator. This type of actuator is one of the most successful commercialized examples of this actuator widely applied in MEMS-based optical switches. As indicated by the simulation results of this paper, many of existing actuator designs have not their dynamic characteristics sufficiently optimized, and therefore, they do not fully exploit the potential of such systems. Our results are supported by simulation experiments, which consider the electrostatic actuator as multiphysics system described by partial differential equations.

Název v anglickém jazyce

An interdisciplinary approach to the design of multiphysics mechatronic systems: The electrostatic actuator design case study

Popis výsledku anglicky

Recent micro-electro-mechanical systems (MEMS) use various principles and phenomena in order to provide required functionality. Due to the interdisciplinary nature of such systems, their design is often a difficult and complex task requiring knowledge from multiple engineering fields. The main complexity in the design is to provide the system with the necessary abilities and to identify possible design drawbacks. In this paper, we demonstrate that the synergy of multiple engineering fields can be reached through the analysis of the designed system and its optimization. In presented case study, we consider an electrostatic parallel-plate actuator. This type of actuator is one of the most successful commercialized examples of this actuator widely applied in MEMS-based optical switches. As indicated by the simulation results of this paper, many of existing actuator designs have not their dynamic characteristics sufficiently optimized, and therefore, they do not fully exploit the potential of such systems. Our results are supported by simulation experiments, which consider the electrostatic actuator as multiphysics system described by partial differential equations.

Druh

D - Stať ve sborníku

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

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Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2016

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of 14th International Symposium MEMS 2016

ISBN

978-80-227-4564-2

ISSN

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e-ISSN

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Počet stran výsledku

11

Strana od-do

16-26

Název nakladatele

Slovak University of Technology

Místo vydání

Bratislava

Místo konání akce

Bratislava

Datum konání akce

25. 5. 2016

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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