Modelling of a MEMS transducer with a square plate loaded by a thin fluid layer

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21260%2F18%3A00322084" target="_blank" >RIV/68407700:21260/18:00322084 - isvavai.cz</a>

Výsledek na webu

<a href="http://www.euronoise2018.eu/docs/papers/58_Euronoise2018.pdf" target="_blank" >http://www.euronoise2018.eu/docs/papers/58_Euronoise2018.pdf</a>

DOI - Digital Object Identifier

—

Jazyk výsledku

angličtina

Název v původním jazyce

Modelling of a MEMS transducer with a square plate loaded by a thin fluid layer

Popis výsledku v původním jazyce

Electroacoustic MEMS transducers are involved in a variety of applications such as consumer devices, but their use increases today also in the domain of wireless noise monitoring systems. Since the high quality (and low price in case of high number of sensor nodes) is needed, the precise modelling of such devices leading to the new solutions is of interest. The transducer, whose model is described herein, consists of a square plate as a moving electrode loaded by a thin fluid gap and a rectangular peripheral cavity, the square shape of the transducer being advantageous from the point of view of microfabrication because of its geometrical simplicity. The analytical approach relies on the integral formulation for the acoustic pressure field in the thin fluid gap (the dissipative effects of the thermal and viscous boundary layers being taken into account) coupled with the displacement field of the plate expressed as a sum of eigenmodes. Special attention is paid herein to the expression of the eigenfunctions of the plate, which are searched for in an approximated analytical form of two-dimensional Fourier series, the coefficients of the series being derived from a simple numerical solution for the plate without the loading acoustic elements. The acoustic pressure sensitivity of the transducer, used as an acoustic receiver, is obtained from the analytical model of the transducer, the comparison with the numerical results provided by a finite element model (a reference against which the analytical results are tested) is presented and discussed.

Název v anglickém jazyce

Modelling of a MEMS transducer with a square plate loaded by a thin fluid layer

Popis výsledku anglicky

Electroacoustic MEMS transducers are involved in a variety of applications such as consumer devices, but their use increases today also in the domain of wireless noise monitoring systems. Since the high quality (and low price in case of high number of sensor nodes) is needed, the precise modelling of such devices leading to the new solutions is of interest. The transducer, whose model is described herein, consists of a square plate as a moving electrode loaded by a thin fluid gap and a rectangular peripheral cavity, the square shape of the transducer being advantageous from the point of view of microfabrication because of its geometrical simplicity. The analytical approach relies on the integral formulation for the acoustic pressure field in the thin fluid gap (the dissipative effects of the thermal and viscous boundary layers being taken into account) coupled with the displacement field of the plate expressed as a sum of eigenmodes. Special attention is paid herein to the expression of the eigenfunctions of the plate, which are searched for in an approximated analytical form of two-dimensional Fourier series, the coefficients of the series being derived from a simple numerical solution for the plate without the loading acoustic elements. The acoustic pressure sensitivity of the transducer, used as an acoustic receiver, is obtained from the analytical model of the transducer, the comparison with the numerical results provided by a finite element model (a reference against which the analytical results are tested) is presented and discussed.

Druh

D - Stať ve sborníku

CEP obor

—

OECD FORD obor

20201 - Electrical and electronic engineering

Projekt

—

Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2018

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Euronoise 2018

ISBN

—

ISSN

2226-5147

e-ISSN

2226-5147

Počet stran výsledku

4

Strana od-do

337-340

Název nakladatele

European Acoustics Association

Místo vydání

Madrid

Místo konání akce

Heraklion, Crete

Datum konání akce

27. 5. 2018

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

—