Modelling of a MEMS transducer using approximate eigenfunctions of a square clamped plate

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21260%2F19%3A00333530" target="_blank" >RIV/68407700:21260/19:00333530 - isvavai.cz</a>

Výsledek na webu

<a href="http://pub.dega-akustik.de/ICA2019/data/articles/000778.pdf" target="_blank" >http://pub.dega-akustik.de/ICA2019/data/articles/000778.pdf</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.18154/RWTH-CONV-239436" target="_blank" >10.18154/RWTH-CONV-239436</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Modelling of a MEMS transducer using approximate eigenfunctions of a square clamped plate

Popis výsledku v původním jazyce

The model of electroacoustic MEMS transducer with a moving square shaped clamped plate loaded by a thin fluid gap and a peripheral cavity is presented herein. The behaviour of the transducer, namely the thermal and viscous boundary layers effects originating in the fluid gap between the moving electrode and the fixed one and the strong coupling between the moving electrode displacement and the acoustic pressure field in the fluid gap, have to be described correctly by the model. The modelling approach proposed herein involving the integral method for describing the acoustic pressure in the fluid gap requires an analytical expression of eigenfunctions of the square shaped clamped plate. Such an approximate expression in form of two-dimensional cosine series proposed recently suffers from slow convergence and inaccurate boundary conditions. The solution proposed herein is based on the series expansion over the system of functions satisfying exactly the boundary conditions, which leads to faster convergence, hence lowering computational costs. The proposed eigenfunctions are described and the difference from the previous approximations is discussed. Finally, the acoustic pressure sensitivity of the transducer is presented and compared to the results of a reference finite element model.

Název v anglickém jazyce

Modelling of a MEMS transducer using approximate eigenfunctions of a square clamped plate

Popis výsledku anglicky

The model of electroacoustic MEMS transducer with a moving square shaped clamped plate loaded by a thin fluid gap and a peripheral cavity is presented herein. The behaviour of the transducer, namely the thermal and viscous boundary layers effects originating in the fluid gap between the moving electrode and the fixed one and the strong coupling between the moving electrode displacement and the acoustic pressure field in the fluid gap, have to be described correctly by the model. The modelling approach proposed herein involving the integral method for describing the acoustic pressure in the fluid gap requires an analytical expression of eigenfunctions of the square shaped clamped plate. Such an approximate expression in form of two-dimensional cosine series proposed recently suffers from slow convergence and inaccurate boundary conditions. The solution proposed herein is based on the series expansion over the system of functions satisfying exactly the boundary conditions, which leads to faster convergence, hence lowering computational costs. The proposed eigenfunctions are described and the difference from the previous approximations is discussed. Finally, the acoustic pressure sensitivity of the transducer is presented and compared to the results of a reference finite element model.

Druh

D - Stať ve sborníku

CEP obor

—

OECD FORD obor

20201 - Electrical and electronic engineering

Projekt

—

Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of the 23rd International Congress on Acoustics, integrating 4th EAA Euroregio 2019

ISBN

978-3-939296-15-7

ISSN

—

e-ISSN

2226-7808

Počet stran výsledku

8

Strana od-do

7361-7368

Název nakladatele

Deutsche Gesellschaft für Akustik

Místo vydání

Dresden

Místo konání akce

Aachen

Datum konání akce

9. 9. 2019

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

—