Modelling approach for MEMS transducers with rectangular clamped plate loaded by a thin fluid layer

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F20%3A00339269" target="_blank" >RIV/68407700:21230/20:00339269 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68407700:21260/20:00339269

Výsledek na webu

<a href="https://doi.org/10.1016/j.jsv.2020.115246" target="_blank" >https://doi.org/10.1016/j.jsv.2020.115246</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.jsv.2020.115246" target="_blank" >10.1016/j.jsv.2020.115246</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Modelling approach for MEMS transducers with rectangular clamped plate loaded by a thin fluid layer

Popis výsledku v původním jazyce

The paper is mainly concerned with the analytical approach of the behaviour of a two-dimensional miniaturized MEMS transducer, namely a rectangular or square clamped plate loaded by a fluid-gap (squeeze film), surrounded by a small cavity (reservoir), and excited by an incident acoustic field (assume to be uniform on the plate). Until now, the problem has not been analytically solved owing to the geometry of the device in conjunction with the nature of the diaphragm (elastic plate) and its boundary conditions (zero deflection and zero normal slope along all edges); namely analytical eigenfunctions do not exist for the clamped plate. On the other hand, the analytical approach classically used to express the acoustic field in the fluid-gap relies on a modal expansion which does not match correctly with both the displacement field of the diaphragm and the boundary conditions at the entrance of the reservoir. Then, two particular questions arise: how to derive analytically the modal behaviour of the loaded clamped plate, and what analytical approach for the acoustic field in the fluid gap is convenient to describe its coupling with the displacement field of the plate? The aim of the paper is both to provide basically an exact analytical approach and to handle a numerical implementation (FEM) against which the analytical results are tested.

Název v anglickém jazyce

Modelling approach for MEMS transducers with rectangular clamped plate loaded by a thin fluid layer

Popis výsledku anglicky

The paper is mainly concerned with the analytical approach of the behaviour of a two-dimensional miniaturized MEMS transducer, namely a rectangular or square clamped plate loaded by a fluid-gap (squeeze film), surrounded by a small cavity (reservoir), and excited by an incident acoustic field (assume to be uniform on the plate). Until now, the problem has not been analytically solved owing to the geometry of the device in conjunction with the nature of the diaphragm (elastic plate) and its boundary conditions (zero deflection and zero normal slope along all edges); namely analytical eigenfunctions do not exist for the clamped plate. On the other hand, the analytical approach classically used to express the acoustic field in the fluid-gap relies on a modal expansion which does not match correctly with both the displacement field of the diaphragm and the boundary conditions at the entrance of the reservoir. Then, two particular questions arise: how to derive analytically the modal behaviour of the loaded clamped plate, and what analytical approach for the acoustic field in the fluid gap is convenient to describe its coupling with the displacement field of the plate? The aim of the paper is both to provide basically an exact analytical approach and to handle a numerical implementation (FEM) against which the analytical results are tested.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10307 - Acoustics

Projekt

—

Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2020

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of Sound and Vibration

ISSN

0022-460X

e-ISSN

1095-8568

Svazek periodika

473

Číslo periodika v rámci svazku

May

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

11

Strana od-do

—

Kód UT WoS článku

000518436100027

EID výsledku v databázi Scopus

2-s2.0-85079556085