Analytical modelling of a MEMS transducer composed of a rigid micro-beam attached at one end to a flat spring moving against a reduced-size backplate

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21260%2F19%3A00333363" target="_blank" >RIV/68407700:21260/19:00333363 - isvavai.cz</a>

Výsledek na webu

<a href="http://pub.dega-akustik.de/ICA2019/data/articles/001053.pdf" target="_blank" >http://pub.dega-akustik.de/ICA2019/data/articles/001053.pdf</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.18154/RWTH-CONV-239662" target="_blank" >10.18154/RWTH-CONV-239662</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Analytical modelling of a MEMS transducer composed of a rigid micro-beam attached at one end to a flat spring moving against a reduced-size backplate

Popis výsledku v původním jazyce

The use of planar micro-beams as moving parts of acoustic and electroacoustic devices has increased recently because of their geometrical simplicity, hence lowering fabrication costs. The precise modelling of such devices is then of interest. The miniaturized transducer proposed herein is composed of a planar rigid micro-beam attached at one end to a flat spring (the other end remaining free) surrounded by thin slits and loaded by a thin fluid layer (situated in the gap between the micro-beam and a reduced-size backplate) and a small cavity, both being placed behind the beam. Such a configuration reduces the overall size of the device (no need of an external cavity) and enables to adjust more parameters comparing to the case of the backplate of the same size as the one of the micro-beam. The thermoviscous damping effects originating in the fluid-filled parts of the device (slits, air-gap, and cavity) are taken into account. As a result of the model, the displacement of the micro-beam is calculated and compared with the reference finite element solution, the acoustic pressure sensitivity of the transducer is finally presented and discussed.

Název v anglickém jazyce

Analytical modelling of a MEMS transducer composed of a rigid micro-beam attached at one end to a flat spring moving against a reduced-size backplate

Popis výsledku anglicky

The use of planar micro-beams as moving parts of acoustic and electroacoustic devices has increased recently because of their geometrical simplicity, hence lowering fabrication costs. The precise modelling of such devices is then of interest. The miniaturized transducer proposed herein is composed of a planar rigid micro-beam attached at one end to a flat spring (the other end remaining free) surrounded by thin slits and loaded by a thin fluid layer (situated in the gap between the micro-beam and a reduced-size backplate) and a small cavity, both being placed behind the beam. Such a configuration reduces the overall size of the device (no need of an external cavity) and enables to adjust more parameters comparing to the case of the backplate of the same size as the one of the micro-beam. The thermoviscous damping effects originating in the fluid-filled parts of the device (slits, air-gap, and cavity) are taken into account. As a result of the model, the displacement of the micro-beam is calculated and compared with the reference finite element solution, the acoustic pressure sensitivity of the transducer is finally presented and discussed.

Druh

D - Stať ve sborníku

CEP obor

—

OECD FORD obor

20201 - Electrical and electronic engineering

Projekt

—

Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of the 23rd International Congress on Acoustics, integrating 4th EAA Euroregio 2019

ISBN

978-3-939296-15-7

ISSN

—

e-ISSN

2226-7808

Počet stran výsledku

7

Strana od-do

7410-7416

Název nakladatele

Deutsche Gesellschaft für Akustik

Místo vydání

Dresden

Místo konání akce

Aachen

Datum konání akce

9. 9. 2019

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

—