Characterization of RF-Sputtered Self-Polarized PZT thin Films for IR Sensor Arrays

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F02%3A04083798" target="_blank" >RIV/68407700:21340/02:04083798 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Characterization of RF-Sputtered Self-Polarized PZT thin Films for IR Sensor Arrays

Popis výsledku v původním jazyce

In this work, a complex investigation of film composition, microstructure and physical properties of RF-sputtered self-polarized PZT thin films for IR sensor arrays was carried out. Hydrostatic stresses in Si substrates near edges of Pt/PZT microstructures were predicted theoretically by finite element calculations and measured by spatially resolved Raman spectroscopy. High hydrostatic stresses were obtained in patterned sensor pixels by Raman piezo-spectroscopy. The laser-intensity-modulation method was applied for the investigation of the self-polarization profile, whereas the depth profile of the refractive index was determined by means of spectroscopic ellipsometry. Polarization and refractive index profiles as well as interface stresses affect IR-radiation sensor performance. Thickness and area dependences of IR-radiation detector detectivity and noise equivalent temperature difference were calculated.

Název v anglickém jazyce

Characterization of RF-Sputtered Self-Polarized PZT thin Films for IR Sensor Arrays

Popis výsledku anglicky

In this work, a complex investigation of film composition, microstructure and physical properties of RF-sputtered self-polarized PZT thin films for IR sensor arrays was carried out. Hydrostatic stresses in Si substrates near edges of Pt/PZT microstructures were predicted theoretically by finite element calculations and measured by spatially resolved Raman spectroscopy. High hydrostatic stresses were obtained in patterned sensor pixels by Raman piezo-spectroscopy. The laser-intensity-modulation method was applied for the investigation of the self-polarization profile, whereas the depth profile of the refractive index was determined by means of spectroscopic ellipsometry. Polarization and refractive index profiles as well as interface stresses affect IR-radiation sensor performance. Thickness and area dependences of IR-radiation detector detectivity and noise equivalent temperature difference were calculated.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2002

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Vacuum

ISSN

0042-207X

e-ISSN

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Svazek periodika

66

Číslo periodika v rámci svazku

3-4

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

6

Strana od-do

473-478

Kód UT WoS článku

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EID výsledku v databázi Scopus

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