Water-Window Microscope Based on Nitrogen Plasma Capillary Discharge Source

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F15%3A00234704" target="_blank" >RIV/68407700:21340/15:00234704 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68407700:21460/15:00234704

Výsledek na webu

<a href="http://www.euvlitho.com/2015/S63.pdf" target="_blank" >http://www.euvlitho.com/2015/S63.pdf</a>

DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Water-Window Microscope Based on Nitrogen Plasma Capillary Discharge Source

Popis výsledku v původním jazyce

We present a design of transmission water-window microscope based on nitrogen plasma generated by the Z-pinching capillary discharge source (table-top), operating at the wavelength ? = 2.88 nm. Plasma is generated by a current discharge through a 10 cm long, 3.2 mm inner diameter ceramic capillary filled with nitrogen gas. Average photons flux is 5 x 1013 photons/(sr x line x pulse), beam divergence is 30 mrad and source size is 360 ?m. Soft X-ray radiation is filtered by Titanium filter (0.5 ?m) and focused by an ellipsoidal (nickel coated) condenser mirror. The image of a sample is taken using a Fresnel zone plate onto a CCD camera. We demonstrate an image of a copper grid mesh with the magnification 300x, exposure time 1 min and the spatial resolution 110 nm (half-pitch).

Název v anglickém jazyce

Water-Window Microscope Based on Nitrogen Plasma Capillary Discharge Source

Popis výsledku anglicky

We present a design of transmission water-window microscope based on nitrogen plasma generated by the Z-pinching capillary discharge source (table-top), operating at the wavelength ? = 2.88 nm. Plasma is generated by a current discharge through a 10 cm long, 3.2 mm inner diameter ceramic capillary filled with nitrogen gas. Average photons flux is 5 x 1013 photons/(sr x line x pulse), beam divergence is 30 mrad and source size is 360 ?m. Soft X-ray radiation is filtered by Titanium filter (0.5 ?m) and focused by an ellipsoidal (nickel coated) condenser mirror. The image of a sample is taken using a Fresnel zone plate onto a CCD camera. We demonstrate an image of a copper grid mesh with the magnification 300x, exposure time 1 min and the spatial resolution 110 nm (half-pitch).

Druh

O - Ostatní výsledky

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

<a href="/cs/project/LG13029" target="_blank" >LG13029: Výzkum v rámci Mezinárodního centra hustého magnetizovaného plazmatu</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů