A stand-alone compact EUV microscope based on gas-puff target source

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F17%3A00303226" target="_blank" >RIV/68407700:21340/17:00303226 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68407700:21460/17:00303226

Výsledek na webu

<a href="http://onlinelibrary.wiley.com/doi/10.1111/jmi.12494/full" target="_blank" >http://onlinelibrary.wiley.com/doi/10.1111/jmi.12494/full</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1111/jmi.12494" target="_blank" >10.1111/jmi.12494</a>

Jazyk výsledku

angličtina

Název v původním jazyce

A stand-alone compact EUV microscope based on gas-puff target source

Popis výsledku v původním jazyce

We report on a very compact desk-top transmission extreme ultraviolet (EUV) microscope based on a laser-plasma source with a double stream gas-puff target, capable of acquiring magnified images of objects with a spatial (half-pitch) resolution of sub-50 nm. A multilayer ellipsoidal condenser is used to focus and spectrally narrow the radiation from the plasma, producing a quasi-monochromatic EUV radiation (λ = 13.8 nm) illuminating the object, whereas a Fresnel zone plate objective forms the image. Design details, development, characterization and optimization of the EUV source and the microscope are described and discussed. Test object and other samples were imaged to demonstrate superior resolution compared to visible light microscopy.

Název v anglickém jazyce

A stand-alone compact EUV microscope based on gas-puff target source

Popis výsledku anglicky

We report on a very compact desk-top transmission extreme ultraviolet (EUV) microscope based on a laser-plasma source with a double stream gas-puff target, capable of acquiring magnified images of objects with a spatial (half-pitch) resolution of sub-50 nm. A multilayer ellipsoidal condenser is used to focus and spectrally narrow the radiation from the plasma, producing a quasi-monochromatic EUV radiation (λ = 13.8 nm) illuminating the object, whereas a Fresnel zone plate objective forms the image. Design details, development, characterization and optimization of the EUV source and the microscope are described and discussed. Test object and other samples were imaged to demonstrate superior resolution compared to visible light microscopy.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

—

Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2017

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of Microscopy

ISSN

0022-2720

e-ISSN

1365-2818

Svazek periodika

265

Číslo periodika v rámci svazku

2

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

10

Strana od-do

251-260

Kód UT WoS článku

000394908800012

EID výsledku v databázi Scopus

2-s2.0-84991822104