Imaging of nanostructures with sub-100 nm spatial resolution using a desktop EUV microscope

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21460%2F12%3A00196864" target="_blank" >RIV/68407700:21460/12:00196864 - isvavai.cz</a>

Výsledek na webu

<a href="http://link.springer.com/content/pdf/10.1007%2Fs00340-012-5125-3" target="_blank" >http://link.springer.com/content/pdf/10.1007%2Fs00340-012-5125-3</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1007/s00340-012-5125-3" target="_blank" >10.1007/s00340-012-5125-3</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Imaging of nanostructures with sub-100 nm spatial resolution using a desktop EUV microscope

Popis výsledku v původním jazyce

Laser-produced plasma sources of short-wavelength radiation offer an interesting alternative to synchrotron and free-electron laser installations. Recently, we reported on a newly developed desktop EUV microscope based on plasma generated from a gas-pufftarget and diffractive optics. The half-pitch resolution of the microscope approached 50 nm. Compared to analogous microscopes based on synchrotron sources, our system is compact and cost-effective. In this paper, we present the results of imaging experiments on a thin polycrystalline object that was carried out in order to further examine the applicability of the microscope. We have demonstrated here that EUV microscopy can provide structural information that cannot be accessed by conventional opticalmicroscopy or SEM.

Název v anglickém jazyce

Imaging of nanostructures with sub-100 nm spatial resolution using a desktop EUV microscope

Popis výsledku anglicky

Laser-produced plasma sources of short-wavelength radiation offer an interesting alternative to synchrotron and free-electron laser installations. Recently, we reported on a newly developed desktop EUV microscope based on plasma generated from a gas-pufftarget and diffractive optics. The half-pitch resolution of the microscope approached 50 nm. Compared to analogous microscopes based on synchrotron sources, our system is compact and cost-effective. In this paper, we present the results of imaging experiments on a thin polycrystalline object that was carried out in order to further examine the applicability of the microscope. We have demonstrated here that EUV microscopy can provide structural information that cannot be accessed by conventional opticalmicroscopy or SEM.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

<a href="/cs/project/KAN300100702" target="_blank" >KAN300100702: Vytváření a charakterizace nanostruktur rentgenovými lasery</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Applied Physics B: Lasers and Optics

ISSN

0946-2171

e-ISSN

—

Svazek periodika

109

Číslo periodika v rámci svazku

1

Stát vydavatele periodika

DE - Spolková republika Německo

Počet stran výsledku

7

Strana od-do

105-111

Kód UT WoS článku

000310743700016

EID výsledku v databázi Scopus

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