Common path two-wavelength homodyne counting interferometer development

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F09%3A%230000121" target="_blank" >RIV/00177016:_____/09:#0000121 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Common path two-wavelength homodyne counting interferometer development

Popis výsledku v původním jazyce

The linearity of displacement measurement is an important parameter in nanometrology. The development of the common path two-wavelength (633 nm and 532 nm) homodyne counting interferometer within the Nanotrace project is described. These two differentialinterferometers are also designed for the elimination of optical path drifts and fluctuations. Their short-term instability is projected to be in the order of tens of pm in the single wavelength path difference and below 10 pm in the difference of thesetwo wavelength path differences. This solution enables better real-time validation of interferometer fringe interpolation. The whole system could be transportable and measure displacements up to 100 ?m under ambient air conditions under cover. Refractive index compensation will also be included.

Název v anglickém jazyce

Common path two-wavelength homodyne counting interferometer development

Popis výsledku anglicky

The linearity of displacement measurement is an important parameter in nanometrology. The development of the common path two-wavelength (633 nm and 532 nm) homodyne counting interferometer within the Nanotrace project is described. These two differentialinterferometers are also designed for the elimination of optical path drifts and fluctuations. Their short-term instability is projected to be in the order of tens of pm in the single wavelength path difference and below 10 pm in the difference of thesetwo wavelength path differences. This solution enables better real-time validation of interferometer fringe interpolation. The whole system could be transportable and measure displacements up to 100 ?m under ambient air conditions under cover. Refractive index compensation will also be included.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

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Návaznosti

R - Projekt Ramcoveho programu EK

Rok uplatnění

2009

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Measurement Science and Technology

ISSN

1361-6501

e-ISSN

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Svazek periodika

20

Číslo periodika v rámci svazku

8

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

4

Strana od-do

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Kód UT WoS článku

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EID výsledku v databázi Scopus

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