Traceable measurements of small forces and local mechanical properties

Kód výsledku v IS VaVaI

RIV/00177016:_____/11:#0000381 - isvavai.cz

Výsledek na webu

http://dx.doi.org/10.1088/0957-0233/22/9/094007

DOI - Digital Object Identifier

10.1088/0957-0233/22/9/094007

Jazyk výsledku

angličtina

Název v původním jazyce

Traceable measurements of small forces and local mechanical properties

Popis výsledku v původním jazyce

Measurement of local mechanical properties is an important topic in the fields of nanoscale device fabrication, thin film deposition and composite material development. Nanoindentation instruments are commonly used to study hardness and related mechanical properties at the nanoscale. However, traceability and uncertainty aspects of the measurement process often remain left aside. In this contribution, the use of a commercial nanoindentation instrument for metrology purposes will be discussed. Full instrument traceability, provided using atomic force microscope cantilevers and a mass comparator (normal force), interferometer (depth) and atomic force microscope (area function) is described. The uncertainty of the loading/unloading curve measurements willbe analyzed and the resulting uncertainties for quantities, that are computed from loading curves such as hardness or elastic modulus, are studied. For this calculation a combination of uncertainty propagation law and Monte Carlo uncerta

Název v anglickém jazyce

Traceable measurements of small forces and local mechanical properties

Popis výsledku anglicky

Measurement of local mechanical properties is an important topic in the fields of nanoscale device fabrication, thin film deposition and composite material development. Nanoindentation instruments are commonly used to study hardness and related mechanical properties at the nanoscale. However, traceability and uncertainty aspects of the measurement process often remain left aside. In this contribution, the use of a commercial nanoindentation instrument for metrology purposes will be discussed. Full instrument traceability, provided using atomic force microscope cantilevers and a mass comparator (normal force), interferometer (depth) and atomic force microscope (area function) is described. The uncertainty of the loading/unloading curve measurements willbe analyzed and the resulting uncertainties for quantities, that are computed from loading curves such as hardness or elastic modulus, are studied. For this calculation a combination of uncertainty propagation law and Monte Carlo uncerta

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

KAN311610701: Nanometrologie využívající metod rastrovací sondové mikroskopie

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2011

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Measurement Science and Technology

ISSN

0957-0233

e-ISSN

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Svazek periodika

22

Číslo periodika v rámci svazku

9

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

7

Strana od-do

094007-094013

Kód UT WoS článku

000294764800008

EID výsledku v databázi Scopus

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