Resolution enhancement methods in optical microscopy for dimensional optical metrology

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F25%3AN0000120" target="_blank" >RIV/00177016:_____/25:N0000120 - isvavai.cz</a>

Výsledek na webu

<a href="https://jeos.edpsciences.org/articles/jeos/full_html/2025/01/jeos20240060/jeos20240060.html" target="_blank" >https://jeos.edpsciences.org/articles/jeos/full_html/2025/01/jeos20240060/jeos20240060.html</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1051/jeos/2025002" target="_blank" >10.1051/jeos/2025002</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Resolution enhancement methods in optical microscopy for dimensional optical metrology

Popis výsledku v původním jazyce

In this paper, we discuss several enhancement approaches to increase the resolution and sensitivity of optical microscopy as a tool for dimensional nanometrology. Firstly, we discuss a newly developed through-focus microscopy technique providing additional phase information from the afocal images to increase the nanoscale sensitivity of classical microscopy. We also explore different routes to label-free or semiconductor compatible labelling super-resolution microscopy suitable for a broad range of technical applications. We present initial results from, a new wide-field super-resolution imaging technique enabled by Raman scattering. In addition, we discuss super-resolution imaging using NV centres in nano-diamonds as labels and their application in future reference standards.

Název v anglickém jazyce

Resolution enhancement methods in optical microscopy for dimensional optical metrology

Popis výsledku anglicky

In this paper, we discuss several enhancement approaches to increase the resolution and sensitivity of optical microscopy as a tool for dimensional nanometrology. Firstly, we discuss a newly developed through-focus microscopy technique providing additional phase information from the afocal images to increase the nanoscale sensitivity of classical microscopy. We also explore different routes to label-free or semiconductor compatible labelling super-resolution microscopy suitable for a broad range of technical applications. We present initial results from, a new wide-field super-resolution imaging technique enabled by Raman scattering. In addition, we discuss super-resolution imaging using NV centres in nano-diamonds as labels and their application in future reference standards.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

21100 - Other engineering and technologies

Projekt

<a href="/cs/project/8B21001" target="_blank" >8B21001: Pushing boundaries of nano-dimensional metrology by light</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2025

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of the European Optical Society - Rapid Publications

ISSN

1990-2573

e-ISSN

—

Svazek periodika

21

Číslo periodika v rámci svazku

7

Stát vydavatele periodika

FR - Francouzská republika

Počet stran výsledku

20

Strana od-do

—

Kód UT WoS článku

001426033500001

EID výsledku v databázi Scopus

—