Measurement of the Gas Flow Velocity in the Low Pressure Hollow Cathode Plasma Jet Sputtering System

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F11%3A10109807" target="_blank" >RIV/00216208:11320/11:10109807 - isvavai.cz</a>

Výsledek na webu

<a href="http://www.mff.cuni.cz/veda/konference/wds/proc/pdf11/WDS11_221_f2_Kluson.pdf" target="_blank" >http://www.mff.cuni.cz/veda/konference/wds/proc/pdf11/WDS11_221_f2_Kluson.pdf</a>

DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Measurement of the Gas Flow Velocity in the Low Pressure Hollow Cathode Plasma Jet Sputtering System

Popis výsledku v původním jazyce

We present results from two mutualy independent measurements of flow velocity from the plasma jet nozzle outlet. Operation of the discharge in the pulse regime enables a simple use of the classical Langmuir probe for the flow velocity measurement. Previous probe measurements showed that in the space below the nozzle there is almost no electric field which could accelerate the ions and so we can assume that the propagation of positive ions towards the negatively biased probe is driven just by mutual collisions and the diffusion process. As the second method the well known Pitot tube was used. By this method we have experimentally proved that the flow velocity is almost not at all affected by the presence of plasma, i.e. it does not depend on the fact whether the discharge is on or off. Results of both metods are in a good correspondence. It was documented that the discharge can be operated both as subsonic and as supersonic one. The appropriate dependences of the flow velocity on the di

Název v anglickém jazyce

Measurement of the Gas Flow Velocity in the Low Pressure Hollow Cathode Plasma Jet Sputtering System

Popis výsledku anglicky

We present results from two mutualy independent measurements of flow velocity from the plasma jet nozzle outlet. Operation of the discharge in the pulse regime enables a simple use of the classical Langmuir probe for the flow velocity measurement. Previous probe measurements showed that in the space below the nozzle there is almost no electric field which could accelerate the ions and so we can assume that the propagation of positive ions towards the negatively biased probe is driven just by mutual collisions and the diffusion process. As the second method the well known Pitot tube was used. By this method we have experimentally proved that the flow velocity is almost not at all affected by the presence of plasma, i.e. it does not depend on the fact whether the discharge is on or off. Results of both metods are in a good correspondence. It was documented that the discharge can be operated both as subsonic and as supersonic one. The appropriate dependences of the flow velocity on the di

Druh

D - Stať ve sborníku

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

<a href="/cs/project/GD202%2F08%2FH057" target="_blank" >GD202/08/H057: Moderní trendy ve fyzice plazmatu</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2011

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

WDS'11 Proceedings of Contributed Papers: Part II ? Physics of Plasmas and Ionized Media

ISBN

978-80-7378-185-9

ISSN

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e-ISSN

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Počet stran výsledku

6

Strana od-do

125-130

Název nakladatele

Matfyzpress

Místo vydání

Praha

Místo konání akce

Praha

Datum konání akce

31. 5. 2011

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

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