Computational simulation of metal ion propagation from plasma to substrates with uneven surfaces

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F13%3A10191391" target="_blank" >RIV/00216208:11320/13:10191391 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.vacuum.2012.09.005" target="_blank" >http://dx.doi.org/10.1016/j.vacuum.2012.09.005</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.vacuum.2012.09.005" target="_blank" >10.1016/j.vacuum.2012.09.005</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Computational simulation of metal ion propagation from plasma to substrates with uneven surfaces

Popis výsledku v původním jazyce

The influence of the unevenness of substrates immersed into plasma on plasma surface interactions was studied by the combination of multidimensional fluid modelling and particle simulation connected together in iterative hybrid code. The fluid part of our model consisted of continuity equations for all charged species and Poisson's equation. The non self-consistent particle simulation technique was used both for the calculation of local electron energy distribution function and for the derivation of quantities characterising plasma surface interaction. This approach enabled us to study in detail the structure of the plasma near metal substrates with complex geometries, i.e. planar substrates covered by a variety of hemispherical protrusions. The main attention was devoted to the influence of substrate unevenness in both macroscopic and microscopic spatial scales on both metal ions and ions of background gas propagation to the substrate.

Název v anglickém jazyce

Computational simulation of metal ion propagation from plasma to substrates with uneven surfaces

Popis výsledku anglicky

The influence of the unevenness of substrates immersed into plasma on plasma surface interactions was studied by the combination of multidimensional fluid modelling and particle simulation connected together in iterative hybrid code. The fluid part of our model consisted of continuity equations for all charged species and Poisson's equation. The non self-consistent particle simulation technique was used both for the calculation of local electron energy distribution function and for the derivation of quantities characterising plasma surface interaction. This approach enabled us to study in detail the structure of the plasma near metal substrates with complex geometries, i.e. planar substrates covered by a variety of hemispherical protrusions. The main attention was devoted to the influence of substrate unevenness in both macroscopic and microscopic spatial scales on both metal ions and ions of background gas propagation to the substrate.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2013

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Vacuum

ISSN

0042-207X

e-ISSN

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Svazek periodika

90

Číslo periodika v rámci svazku

duben

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

5

Strana od-do

109-113

Kód UT WoS článku

000313089800019

EID výsledku v databázi Scopus

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