Analytical Evaluation of Plasma Parameters by Optical Emission Spectroscopy in Low-Pressure Hollow Cathode Plasma Jet and Planar Magnetron System by DC and Pulsed DC Excitation Sourc

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F21%3A10440101" target="_blank" >RIV/00216208:11320/21:10440101 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.mff.cuni.cz/veda/konference/wds/proc/pdf21/WDS21_16_f2_Mishra.pdf" target="_blank" >https://www.mff.cuni.cz/veda/konference/wds/proc/pdf21/WDS21_16_f2_Mishra.pdf</a>

DOI - Digital Object Identifier

—

Jazyk výsledku

angličtina

Název v původním jazyce

Analytical Evaluation of Plasma Parameters by Optical Emission Spectroscopy in Low-Pressure Hollow Cathode Plasma Jet and Planar Magnetron System by DC and Pulsed DC Excitation Sourc

Popis výsledku v původním jazyce

Optical emission spectroscopy (OES) unified with the models of plasma light emission becomes a non-intrusive and versatile method for plasma parameters determination. Each spectral line in emission spectroscopy corresponds to an optical transition between two quantum levels of atom/molecule. The number density of gas species in the upper state determines the spectral line intensity. The spectral line intensities regulate densities of species in various states. With the utilization of the modified Boltzmann equation and line intensity ratios, one can calculate the electron temperature (Te) and electron density (ne). The analytical evaluation of plasma parameters in the low-pressure regime for hollow cathode plasma jet (HC) and planar magnetron system (PMS) in presence of DC and pulsed-DC excitation source was performed successfully. The effect of various processing parameters like power, working pressure on plasma parameters have been investigated in presence of argon (Ar) gas atmosphere.

Název v anglickém jazyce

Analytical Evaluation of Plasma Parameters by Optical Emission Spectroscopy in Low-Pressure Hollow Cathode Plasma Jet and Planar Magnetron System by DC and Pulsed DC Excitation Sourc

Popis výsledku anglicky

Optical emission spectroscopy (OES) unified with the models of plasma light emission becomes a non-intrusive and versatile method for plasma parameters determination. Each spectral line in emission spectroscopy corresponds to an optical transition between two quantum levels of atom/molecule. The number density of gas species in the upper state determines the spectral line intensity. The spectral line intensities regulate densities of species in various states. With the utilization of the modified Boltzmann equation and line intensity ratios, one can calculate the electron temperature (Te) and electron density (ne). The analytical evaluation of plasma parameters in the low-pressure regime for hollow cathode plasma jet (HC) and planar magnetron system (PMS) in presence of DC and pulsed-DC excitation source was performed successfully. The effect of various processing parameters like power, working pressure on plasma parameters have been investigated in presence of argon (Ar) gas atmosphere.

Druh

D - Stať ve sborníku

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

—

Návaznosti

S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2021

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

WDS&apos;21 Proceedings of Contributed Papers — Physics

ISBN

978-80-7378-455-3

ISSN

—

e-ISSN

—

Počet stran výsledku

8

Strana od-do

112-119

Název nakladatele

Matfyzpress

Místo vydání

Praha

Místo konání akce

Praha/ZOOM

Datum konání akce

15. 6. 2021

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

—