Optical emission spectroscopy study of plasma parameters in low-pressure hollow cathode plasma jet and planar magnetron powered by DC and pulsed DC supply

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F22%3A10446945" target="_blank" >RIV/00216208:11320/22:10446945 - isvavai.cz</a>

Výsledek na webu

<a href="https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=0qXer7ajFf" target="_blank" >https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=0qXer7ajFf</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.vacuum.2022.111413" target="_blank" >10.1016/j.vacuum.2022.111413</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Optical emission spectroscopy study of plasma parameters in low-pressure hollow cathode plasma jet and planar magnetron powered by DC and pulsed DC supply

Popis výsledku v původním jazyce

Optical emission spectroscopy (OES) has become a non-intrusive and versatile method for plasma parameters determination. Each spectral line in emission spectroscopy corresponds to an optical transition between two quantum levels of atom/molecule. The spectral line intensities are controlled by densities of species in various upper states. We calculated the electron temperature (T-e) and electron density (n(e)) in low-pressure discharge systems based on the modified Boltzmann equation and line intensity ratios. We have evaluated the mentioned plasma parameters in the low-pressure hollow cathode plasma jet (HC) and planar magnetron cathode system (PM) in the continuous DC and the pulsed-DC regime. We present the dependences of the electron temperature (T-e) and electron density (n(e)) on the applied power and the argon flow rate in the mentioned two systems together with a qualitative discussion of the obtained results.

Název v anglickém jazyce

Optical emission spectroscopy study of plasma parameters in low-pressure hollow cathode plasma jet and planar magnetron powered by DC and pulsed DC supply

Popis výsledku anglicky

Optical emission spectroscopy (OES) has become a non-intrusive and versatile method for plasma parameters determination. Each spectral line in emission spectroscopy corresponds to an optical transition between two quantum levels of atom/molecule. The spectral line intensities are controlled by densities of species in various upper states. We calculated the electron temperature (T-e) and electron density (n(e)) in low-pressure discharge systems based on the modified Boltzmann equation and line intensity ratios. We have evaluated the mentioned plasma parameters in the low-pressure hollow cathode plasma jet (HC) and planar magnetron cathode system (PM) in the continuous DC and the pulsed-DC regime. We present the dependences of the electron temperature (T-e) and electron density (n(e)) on the applied power and the argon flow rate in the mentioned two systems together with a qualitative discussion of the obtained results.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

—

Návaznosti

S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2022

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Vacuum

ISSN

0042-207X

e-ISSN

1879-2715

Svazek periodika

205

Číslo periodika v rámci svazku

Nov

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

8

Strana od-do

111413

Kód UT WoS článku

000848163400007

EID výsledku v databázi Scopus

2-s2.0-85136147105