Applications of atomic force microscopy for thin film boundary measurements

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F02%3A00006295" target="_blank" >RIV/00216224:14310/02:00006295 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Applications of atomic force microscopy for thin film boundary measurements

Popis výsledku v původním jazyce

In this article results concerning both the theoretical and experimental studies of the upper boundaries of columnar thin fil ms performed using the atomic force microscopy are presented. Main statistical quantities used to determine the roughness of thecolumnar thin film upper boundary properties are decribed. The errors due to the tip convolution effects are discussed as well. For the theoretical study the columnar structure obtained by a simple Monte-Carlo simulation is employed. The experime ntal values of the statistical quantities are obtained by measuring the HfO2 (hafnia) and ZrO2 (zirconia) thin films created by vacuum evaporation. Within both the theoretical and experimental studies presented it is shown that the strongest misrepresentationof the measured roughness of the upper boundaries of the columnar thin films originates for the linear dimensions o f the columns smaller or comparable with the linear dimensions of the tip of an atomic force microscope used. The results

Název v anglickém jazyce

Applications of atomic force microscopy for thin film boundary measurements

Popis výsledku anglicky

In this article results concerning both the theoretical and experimental studies of the upper boundaries of columnar thin fil ms performed using the atomic force microscopy are presented. Main statistical quantities used to determine the roughness of thecolumnar thin film upper boundary properties are decribed. The errors due to the tip convolution effects are discussed as well. For the theoretical study the columnar structure obtained by a simple Monte-Carlo simulation is employed. The experime ntal values of the statistical quantities are obtained by measuring the HfO2 (hafnia) and ZrO2 (zirconia) thin films created by vacuum evaporation. Within both the theoretical and experimental studies presented it is shown that the strongest misrepresentationof the measured roughness of the upper boundaries of the columnar thin films originates for the linear dimensions o f the columns smaller or comparable with the linear dimensions of the tip of an atomic force microscope used. The results

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2002

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Jemná mechanika a optika

ISSN

0447-6441

e-ISSN

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Svazek periodika

47

Číslo periodika v rámci svazku

6-7

Stát vydavatele periodika

CZ - Česká republika

Počet stran výsledku

5

Strana od-do

195-199

Kód UT WoS článku

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EID výsledku v databázi Scopus

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