Role sekundarních elektronů v nízkotlakém rf doutnavém výboji

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F05%3A00024543" target="_blank" >RIV/00216224:14310/05:00024543 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

The Role of Secondary Electrons in Low Pressure rf Glow Discharge

Popis výsledku v původním jazyce

We concerned on the role of secondary electrons in low pressure rf glow discharge. The Particle in Cell/Monte Carlo computer simulations (PIC/MC) was applied to simulate the discharge. The influence of secondary electron emission yield (SEY) on the plasma density was studied. Furthermore the relative density and the electron energy probability function of secondary particles, i.e., secondary electrons and the products of ionizing collisions of secondary electrons was determined. We found that the secondary particles play very important role in this type of discharge. The relative density of secondary electrons created on electrodes is 2-10%, 5-15% for the value of SEY = 0.1, 0.2 respectively. But due to the high electric intensity in electrode sheathsthese electrons have relatively high energy and therefore they can ionize neutral atoms. As consequence of this the relative density of the secondary electrons (secondaries) and electrons created in ionizing collisions of the secondaries

Název v anglickém jazyce

The Role of Secondary Electrons in Low Pressure rf Glow Discharge

Popis výsledku anglicky

We concerned on the role of secondary electrons in low pressure rf glow discharge. The Particle in Cell/Monte Carlo computer simulations (PIC/MC) was applied to simulate the discharge. The influence of secondary electron emission yield (SEY) on the plasma density was studied. Furthermore the relative density and the electron energy probability function of secondary particles, i.e., secondary electrons and the products of ionizing collisions of secondary electrons was determined. We found that the secondary particles play very important role in this type of discharge. The relative density of secondary electrons created on electrodes is 2-10%, 5-15% for the value of SEY = 0.1, 0.2 respectively. But due to the high electric intensity in electrode sheathsthese electrons have relatively high energy and therefore they can ionize neutral atoms. As consequence of this the relative density of the secondary electrons (secondaries) and electrons created in ionizing collisions of the secondaries

Druh

D - Stať ve sborníku

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

<a href="/cs/project/GA202%2F03%2F0827" target="_blank" >GA202/03/0827: Studium elementárních procesů v nízkoteplotním a technologicky orientovaném plazmatu a vývoj relevantních diagnostických metod</a><br>

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2005

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

WDS 2005 - Proceedings of Contributed Papers

ISBN

80-86732-59-2

ISSN

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e-ISSN

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Počet stran výsledku

6

Strana od-do

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Název nakladatele

MATFYZPRESS

Místo vydání

Prague

Místo konání akce

Prague

Datum konání akce

7. 6. 2005

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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