Optická charakterizace uhlíkových vrstev připravených metodou PECVD pomocí elipsometrie a reflektometrie

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F06%3A00015814" target="_blank" >RIV/00216224:14310/06:00015814 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Optical characterization of carbon films prepared by PECVD using ellipsometry and reflectometry

Popis výsledku v původním jazyce

Carbon polymer-like films were prepared using plasma enhanced chemical vapor deposition in pulsed regime in Ar-acetylene gas mixture. The optical characterization of these films was performed by variable angle spectroscopic ellipsometry and spectroscopicreflectometry applied at near-normal incidence within the spectral region 190 - 1000 nm. The ellipsometric and reflectometric data were treated separately for the individual samples of the films mentioned above. For treating these data the structural model of the films containing roughness of the boundaries was used. Boundary roughness was included into the formulae for the ellipsometric quantities and reflectance of the films by means of the scalar diffraction theory. Furthermore, the dispersion modelbased on parameterization of the density of electronic states was employed for expressing the spectral dependences of the optical constants describing the films studied. Within the optical characterization the thicknesses, spectral depen

Název v anglickém jazyce

Optical characterization of carbon films prepared by PECVD using ellipsometry and reflectometry

Popis výsledku anglicky

Carbon polymer-like films were prepared using plasma enhanced chemical vapor deposition in pulsed regime in Ar-acetylene gas mixture. The optical characterization of these films was performed by variable angle spectroscopic ellipsometry and spectroscopicreflectometry applied at near-normal incidence within the spectral region 190 - 1000 nm. The ellipsometric and reflectometric data were treated separately for the individual samples of the films mentioned above. For treating these data the structural model of the films containing roughness of the boundaries was used. Boundary roughness was included into the formulae for the ellipsometric quantities and reflectance of the films by means of the scalar diffraction theory. Furthermore, the dispersion modelbased on parameterization of the density of electronic states was employed for expressing the spectral dependences of the optical constants describing the films studied. Within the optical characterization the thicknesses, spectral depen

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

<a href="/cs/project/GD202%2F03%2FH162" target="_blank" >GD202/03/H162: Pokročilé směry ve fyzice a chemii plazmatu</a><br>

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2006

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Czech. J. Phys.

ISSN

0011-4626

e-ISSN

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Svazek periodika

56/2006

Číslo periodika v rámci svazku

Suppl. B

Stát vydavatele periodika

CZ - Česká republika

Počet stran výsledku

7

Strana od-do

1103-1109

Kód UT WoS článku

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EID výsledku v databázi Scopus

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