Infračervená spektroskopie kyslíkových intersticiálů a precipitátů v dusíkem legovaném křemíku

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F06%3A00016777" target="_blank" >RIV/00216224:14310/06:00016777 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Infrared spectroscopy of oxygen interstitials and precipitates in nitrogen-doped silicon

Popis výsledku v původním jazyce

We have used infrared absorption to study interstitial oxygen and oxygen precipitates in a series of nitrogen-doped silicon (Si:N) samples. Transmittance spectra have been measured in the temperature range from 10 to 300 K. This allowed us to separate reliably the contributions of interstitial oxygen (Oi) and oxygen precipitates, obtained in the single-step (16 h at 1050C) and two-step (4 h at 750C, followed by 16 h at 1050C) heat treatment. In the data analysis, we focus on the amount of oxygen available initially in the unannealed material, and its redistribution following the two thermal treatments. The absorption spectra of the precipitates are analysed using effective-medium models; we have used infrared ellipsometric spectra of amorphous silicondioxide, optimized for the range of weak absorption at high frequencies, and their modifications for different stoichiometries. The resulting concentration of Oi and the oxygen atoms in the precipitates is found to depend rather significa

Název v anglickém jazyce

Infrared spectroscopy of oxygen interstitials and precipitates in nitrogen-doped silicon

Popis výsledku anglicky

We have used infrared absorption to study interstitial oxygen and oxygen precipitates in a series of nitrogen-doped silicon (Si:N) samples. Transmittance spectra have been measured in the temperature range from 10 to 300 K. This allowed us to separate reliably the contributions of interstitial oxygen (Oi) and oxygen precipitates, obtained in the single-step (16 h at 1050C) and two-step (4 h at 750C, followed by 16 h at 1050C) heat treatment. In the data analysis, we focus on the amount of oxygen available initially in the unannealed material, and its redistribution following the two thermal treatments. The absorption spectra of the precipitates are analysed using effective-medium models; we have used infrared ellipsometric spectra of amorphous silicondioxide, optimized for the range of weak absorption at high frequencies, and their modifications for different stoichiometries. The resulting concentration of Oi and the oxygen atoms in the precipitates is found to depend rather significa

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2006

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Physica B condensed matter

ISSN

0921-4526

e-ISSN

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Svazek periodika

376-377

Číslo periodika v rámci svazku

6

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

4

Strana od-do

150-153

Kód UT WoS článku

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EID výsledku v databázi Scopus

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