Korelace tepelné stability mechanických a optických vlasností diamantu podobných uhlíkových vrstev

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F07%3A00020890" target="_blank" >RIV/00216224:14310/07:00020890 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00216305:26210/07:PU68172

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films

Popis výsledku v původním jazyce

The aim of the present contribution is the study of the influence of the annealing on the mechanical and optical properties of the plasma deposited diamond-like carbon (DLC) films. The DLC films were prepared for different values of hydrogen content fromthe mixture of methane and hydrogen in capacitively coupled PECVD reactor. Thermal stability of the films was investigated using sample annealing. The optical properties of the as deposited and annealed DLC films were studied ex situ using variable angle spectroscopic ellipsometry and spectroscopic reflectometry applied within the near-UV, visible and near-IR regions. For optical constants our dispersion model based on parameterization of the densities of electronic states was used. The dependence of the hardness and the elastic modulus on the hydrogen content in the deposition feed was determined using depth sensing indentation technique. It was found that with increasing temperature the sp3-to-sp2 ratio, atomic fraction of hydrogen,

Název v anglickém jazyce

Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films

Popis výsledku anglicky

The aim of the present contribution is the study of the influence of the annealing on the mechanical and optical properties of the plasma deposited diamond-like carbon (DLC) films. The DLC films were prepared for different values of hydrogen content fromthe mixture of methane and hydrogen in capacitively coupled PECVD reactor. Thermal stability of the films was investigated using sample annealing. The optical properties of the as deposited and annealed DLC films were studied ex situ using variable angle spectroscopic ellipsometry and spectroscopic reflectometry applied within the near-UV, visible and near-IR regions. For optical constants our dispersion model based on parameterization of the densities of electronic states was used. The dependence of the hardness and the elastic modulus on the hydrogen content in the deposition feed was determined using depth sensing indentation technique. It was found that with increasing temperature the sp3-to-sp2 ratio, atomic fraction of hydrogen,

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

<a href="/cs/project/GA106%2F05%2F0274" target="_blank" >GA106/05/0274: Víceúrovňové studium vztahů mezi mechanickými a mikrostrukturními charakteristikami materiálů</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2007

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Diamond and Related Materials

ISSN

0925-9635

e-ISSN

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Svazek periodika

16

Číslo periodika v rámci svazku

4-7

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

5

Strana od-do

1331-1335

Kód UT WoS článku

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EID výsledku v databázi Scopus

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