Reflectance of non-uniform thin films

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Reflectance of non-uniform thin films

Popis výsledku v původním jazyce

A general formula for the reflectance of a thin film with non-uniform thickness is derived based on expressing its thickness distribution density. Examples of such thickness distribution densities, corresponding to various shapes of the thickness non-uniformity, are presented. In addition, a reflectance formula is derived as the second-order approximation of the general formula expanded into a power series in the root mean square (rms) value of the thickness distribution. By means of a numerical analysis, it is shown that for greater non-uniformities it is necessary to take into account their concrete shapes in the optical characterization, whereas for small non-uniformities the concrete shape is of no importance for the characterization. The theoretical results are applied to the complete optical characterization of a selected non-uniform carbon nitride film.

Název v anglickém jazyce

Reflectance of non-uniform thin films

Popis výsledku anglicky

A general formula for the reflectance of a thin film with non-uniform thickness is derived based on expressing its thickness distribution density. Examples of such thickness distribution densities, corresponding to various shapes of the thickness non-uniformity, are presented. In addition, a reflectance formula is derived as the second-order approximation of the general formula expanded into a power series in the root mean square (rms) value of the thickness distribution. By means of a numerical analysis, it is shown that for greater non-uniformities it is necessary to take into account their concrete shapes in the optical characterization, whereas for small non-uniformities the concrete shape is of no importance for the characterization. The theoretical results are applied to the complete optical characterization of a selected non-uniform carbon nitride film.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2009

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of Optics A: Pure and Applied Optics

ISSN

1464-4258

e-ISSN

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Svazek periodika

11

Číslo periodika v rámci svazku

4

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

9

Strana od-do

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Kód UT WoS článku

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EID výsledku v databázi Scopus

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