PROPERTIES OF MODIFIED AMORPHOUS CARBON THIN FILMS DEPOSITED BY PECVD
Identifikátory výsledku
Kód výsledku v IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F12%3A00057155" target="_blank" >RIV/00216224:14310/12:00057155 - isvavai.cz</a>
Výsledek na webu
<a href="http://www.chemicke-listy.cz/common/content-issue_s5-volume_106-year_2012.html" target="_blank" >http://www.chemicke-listy.cz/common/content-issue_s5-volume_106-year_2012.html</a>
DOI - Digital Object Identifier
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Alternativní jazyky
Jazyk výsledku
angličtina
Název v původním jazyce
PROPERTIES OF MODIFIED AMORPHOUS CARBON THIN FILMS DEPOSITED BY PECVD
Popis výsledku v původním jazyce
The aim of this work was to prepare a set of DLC films from different mixtures of precursor gases (methane, hydrogen, deuterium, nitrogen and/or HMDSO) using RFPECVD on substrates such as crystalline silicon, glass, and steel. The prepared films were characterized by several diagnostic tools and the properties of hydrogenated amorphous carbon films and the modified diamond-like carbon thin films with different admixtures (N, Si, O, D) were compared. Mechanical tests were performed on the obtained filmsmainly using depth sensing indentation method. We focused our attention on the following coating properties: hardness, elastic modulus, fracture toughness, film-substrate adhesion. Additionally, the effect of the internal stress on the indentation response of the filmsubstrate systems was studied. The tribological properties of the films were also investigated. The surface free energy of the films was performed by contact angle measuring technique.
Název v anglickém jazyce
PROPERTIES OF MODIFIED AMORPHOUS CARBON THIN FILMS DEPOSITED BY PECVD
Popis výsledku anglicky
The aim of this work was to prepare a set of DLC films from different mixtures of precursor gases (methane, hydrogen, deuterium, nitrogen and/or HMDSO) using RFPECVD on substrates such as crystalline silicon, glass, and steel. The prepared films were characterized by several diagnostic tools and the properties of hydrogenated amorphous carbon films and the modified diamond-like carbon thin films with different admixtures (N, Si, O, D) were compared. Mechanical tests were performed on the obtained filmsmainly using depth sensing indentation method. We focused our attention on the following coating properties: hardness, elastic modulus, fracture toughness, film-substrate adhesion. Additionally, the effect of the internal stress on the indentation response of the filmsubstrate systems was studied. The tribological properties of the films were also investigated. The surface free energy of the films was performed by contact angle measuring technique.
Klasifikace
Druh
J<sub>x</sub> - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
CEP obor
BL - Fyzika plasmatu a výboje v plynech
OECD FORD obor
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Návaznosti výsledku
Projekt
Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.
Návaznosti
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach
Ostatní
Rok uplatnění
2012
Kód důvěrnosti údajů
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Údaje specifické pro druh výsledku
Název periodika
Chem. listy
ISSN
0009-2770
e-ISSN
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Svazek periodika
106/2012
Číslo periodika v rámci svazku
106
Stát vydavatele periodika
CZ - Česká republika
Počet stran výsledku
5
Strana od-do
"S1499"-"S1503"
Kód UT WoS článku
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EID výsledku v databázi Scopus
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