Silicon-oxide Containing Diamond-like Carbon Coatings Prepared Using Plasma Enhanced Chemical Vapor Deposition

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Silicon-oxide Containing Diamond-like Carbon Coatings Prepared Using Plasma Enhanced Chemical Vapor Deposition

Popis výsledku v původním jazyce

Diamond-like carbon coatings with varous silicon-oxide content were deposited on different substrate materials. The structure of the prepared films was studied with infrared absorption spectroscopy (FTIR) and X-ray photoelectron spectroscopy. Complete atomic compositions, including hydrogen content and film densities, were determined by combination of RBS and ERD analyses. The complex dielectric function of the films was determined from ellipsometric measurements. The mechanical properties of prepared coatings were strudied by means of depth sensing indentation technique. The tribological properties were studied using pin-on-disc tester. The effect of intrinsic stress on the coating properties was investigated. The variation in SiOx concent enabled tominimize the intrinsic compressive stress in coatings.

Název v anglickém jazyce

Silicon-oxide Containing Diamond-like Carbon Coatings Prepared Using Plasma Enhanced Chemical Vapor Deposition

Popis výsledku anglicky

Diamond-like carbon coatings with varous silicon-oxide content were deposited on different substrate materials. The structure of the prepared films was studied with infrared absorption spectroscopy (FTIR) and X-ray photoelectron spectroscopy. Complete atomic compositions, including hydrogen content and film densities, were determined by combination of RBS and ERD analyses. The complex dielectric function of the films was determined from ellipsometric measurements. The mechanical properties of prepared coatings were strudied by means of depth sensing indentation technique. The tribological properties were studied using pin-on-disc tester. The effect of intrinsic stress on the coating properties was investigated. The variation in SiOx concent enabled tominimize the intrinsic compressive stress in coatings.

Druh

O - Ostatní výsledky

CEP obor

JJ - Ostatní materiály

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2006

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů