Depozice a charakterizace nanostrukturovaných diamantu-podobných uhlíkových vrstev obsahujících oxid křemíku

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F07%3A00020754" target="_blank" >RIV/00216224:14310/07:00020754 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68081723:_____/07:00090798 RIV/49777513:23210/07:00000008 RIV/68081723:_____/07:00323375 RIV/61389005:_____/07:00323375 a 2 dalších

Výsledek na webu

—

DOI - Digital Object Identifier

—

Jazyk výsledku

angličtina

Název v původním jazyce

Deposition and Characterization of Nanostructured Silicon-Oxide Containing Diamond-Like Carbon Coatings

Popis výsledku v původním jazyce

Nanostructured diamond-like carbon coatings with various silicon-oxide content were deposited on different substrate materials (silicon, glass, polycarbonate and steel) in capacitively coupled r.f. discharge (13.56 MHz). The structure of the prepared films was studied with infrared absorption spectroscopy (FTIR) and X-ray photoelectron spectroscopy. Complete atomic compositions, including hydrogen content and film densities, were determined by combination of RBS and ERD analyses. The complex dielectricfunction of the films was determined from ellipsometric measurements in the range 1.5-5.2 eV. Matrix Assisted Laser Desorption-Ionisation - Time of Flight Mass Spectrometry (MALDI-TOF) was used to study the deposited films. The mechanical properties of prepared coatings (e.g. hardness, elastic modulus, fracture toughness, coating/substrate adhesion etc.) were studied by means of depth sensing indentation technique using Fischerscope H100 tester. The tribological properties were studied u

Název v anglickém jazyce

Deposition and Characterization of Nanostructured Silicon-Oxide Containing Diamond-Like Carbon Coatings

Popis výsledku anglicky

Nanostructured diamond-like carbon coatings with various silicon-oxide content were deposited on different substrate materials (silicon, glass, polycarbonate and steel) in capacitively coupled r.f. discharge (13.56 MHz). The structure of the prepared films was studied with infrared absorption spectroscopy (FTIR) and X-ray photoelectron spectroscopy. Complete atomic compositions, including hydrogen content and film densities, were determined by combination of RBS and ERD analyses. The complex dielectricfunction of the films was determined from ellipsometric measurements in the range 1.5-5.2 eV. Matrix Assisted Laser Desorption-Ionisation - Time of Flight Mass Spectrometry (MALDI-TOF) was used to study the deposited films. The mechanical properties of prepared coatings (e.g. hardness, elastic modulus, fracture toughness, coating/substrate adhesion etc.) were studied by means of depth sensing indentation technique using Fischerscope H100 tester. The tribological properties were studied u

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

—

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2007

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Optoelectronics and Advanced Materials - Rapid Communications

ISSN

—

e-ISSN

—

Svazek periodika

1

Číslo periodika v rámci svazku

10

Stát vydavatele periodika

RO - Rumunsko

Počet stran výsledku

5

Strana od-do

491-495

Kód UT WoS článku

—

EID výsledku v databázi Scopus

—