Calculation of higher harmonic frequencies generated in capacitively coupled discharges

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F13%3A00068905" target="_blank" >RIV/00216224:14310/13:00068905 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Calculation of higher harmonic frequencies generated in capacitively coupled discharges

Popis výsledku v původním jazyce

Capacitively coupled discharge was modeled as a series combination of two nonlinear sheaths, a bulk plasma and a RF generator. This equivalent circuit was used for calculation of electric characteristics of capacitively coupled discharges including the spontaneous generation of higher harmonic frequencies of discharge current and sheath voltages. The calculation was realized both for single- and for double-frequency discharges. Mutual influences of discharge asymmetry, higher harmonic frequencies and amplitude of discharge voltage were studied. Various effects of plasma resonances and coupling of higher harmonic frequencies were observed and behaviour of higher harmonic frequencies in collisional plasma at high pressure was predicted.

Název v anglickém jazyce

Calculation of higher harmonic frequencies generated in capacitively coupled discharges

Popis výsledku anglicky

Capacitively coupled discharge was modeled as a series combination of two nonlinear sheaths, a bulk plasma and a RF generator. This equivalent circuit was used for calculation of electric characteristics of capacitively coupled discharges including the spontaneous generation of higher harmonic frequencies of discharge current and sheath voltages. The calculation was realized both for single- and for double-frequency discharges. Mutual influences of discharge asymmetry, higher harmonic frequencies and amplitude of discharge voltage were studied. Various effects of plasma resonances and coupling of higher harmonic frequencies were observed and behaviour of higher harmonic frequencies in collisional plasma at high pressure was predicted.

Druh

O - Ostatní výsledky

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

<a href="/cs/project/ED2.1.00%2F03.0086" target="_blank" >ED2.1.00/03.0086: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2013

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů