Determination of sputtered species densities in HIPIMS discharge by optical emission spectroscopy

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F14%3A00073767" target="_blank" >RIV/00216224:14310/14:00073767 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Determination of sputtered species densities in HIPIMS discharge by optical emission spectroscopy

Popis výsledku v původním jazyce

Developing of magnetron sputtering process is aiming mainly to increase ionization of sputtered particles, to improve target yield or to enhance deposition rate. HIPIMS discharge yields higher number density of ionized sputtered species than DC case. However, it is difficult to estimate absolute number densities of the sputtered species (atoms and ions) in ground and metastable states from optical emission spectroscopy, because the ground and metastable levels do not directly produce any optical signal.There has been developed variety of indirect methods, however, mainly for rare gases to obtain information about number densities of metastable levels. Our research aim is to adapt these techniques such as self-absorption or effective branching fraction[1] on conditions of HIPIMS discharge. We ran experiments on magnetron with 20 cm titanium target.

Název v anglickém jazyce

Determination of sputtered species densities in HIPIMS discharge by optical emission spectroscopy

Popis výsledku anglicky

Developing of magnetron sputtering process is aiming mainly to increase ionization of sputtered particles, to improve target yield or to enhance deposition rate. HIPIMS discharge yields higher number density of ionized sputtered species than DC case. However, it is difficult to estimate absolute number densities of the sputtered species (atoms and ions) in ground and metastable states from optical emission spectroscopy, because the ground and metastable levels do not directly produce any optical signal.There has been developed variety of indirect methods, however, mainly for rare gases to obtain information about number densities of metastable levels. Our research aim is to adapt these techniques such as self-absorption or effective branching fraction[1] on conditions of HIPIMS discharge. We ran experiments on magnetron with 20 cm titanium target.

Druh

O - Ostatní výsledky

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2014

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů