Determination of sputtered species densities in a HIPIMS discharge by optical emission spectroscopy

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F14%3A00080621" target="_blank" >RIV/00216224:14310/14:00080621 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Determination of sputtered species densities in a HIPIMS discharge by optical emission spectroscopy

Popis výsledku v původním jazyce

Plasma emission from sputtered species is routinely measured in HIPIMS discharge with aim to e.g. assess ionized fraction of sputtered species, prove gas rarefaction or determine moment of transition from argon to metal dominated regimes. Direct measurements of the sputtered species ground state number densities is performed employing either laser induced fluorescence or absorption measurements. Since the ground or metastable levels of sputtered species do not produce any optical signal directly, it isdifficult to obtain information about the number densities of the species in these levels from optical emission spectroscopy. A variety of indirect methods, however, have been developed mainly for rare gases to obtain information about the metastable state number densities.

Název v anglickém jazyce

Determination of sputtered species densities in a HIPIMS discharge by optical emission spectroscopy

Popis výsledku anglicky

Plasma emission from sputtered species is routinely measured in HIPIMS discharge with aim to e.g. assess ionized fraction of sputtered species, prove gas rarefaction or determine moment of transition from argon to metal dominated regimes. Direct measurements of the sputtered species ground state number densities is performed employing either laser induced fluorescence or absorption measurements. Since the ground or metastable levels of sputtered species do not produce any optical signal directly, it isdifficult to obtain information about the number densities of the species in these levels from optical emission spectroscopy. A variety of indirect methods, however, have been developed mainly for rare gases to obtain information about the metastable state number densities.

Druh

O - Ostatní výsledky

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2014

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů