Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F14%3A00073845" target="_blank" >RIV/00216224:14310/14:00073845 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.surfcoat.2013.12.068" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2013.12.068</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2013.12.068" target="_blank" >10.1016/j.surfcoat.2013.12.068</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools

Popis výsledku v původním jazyce

Titanium carbide/carbon nanocomposite hard coatings, which consist of TiC nanoparticles buried in amorphous carbon matrix, are prepared by a hybrid plasma process combining magnetron sputtering of a titanium target and plasma enhanced chemical vapor deposition using methane as a source for the growth of amorphous carbon. A particular attention was paid to the comparison of the surface and the bulk chemical compositions of the films determined by different analysis techniques: X-ray photoelectron spectroscopy (XPS), Rutherford backscattering spectrometry (RBS), wavelength dispersive X-ray spectroscopy (WDS) and energy dispersive X-ray spectroscopy (EDS). XPS and EDS show an underestimation in carbon concentration compared to RBS and WDS which provide similar values. This underestimation is more important in case of XPS and it is mainly attributed to the presence of oxygen contamination on the surface of the films strongly bonded to titanium.

Název v anglickém jazyce

Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools

Popis výsledku anglicky

Titanium carbide/carbon nanocomposite hard coatings, which consist of TiC nanoparticles buried in amorphous carbon matrix, are prepared by a hybrid plasma process combining magnetron sputtering of a titanium target and plasma enhanced chemical vapor deposition using methane as a source for the growth of amorphous carbon. A particular attention was paid to the comparison of the surface and the bulk chemical compositions of the films determined by different analysis techniques: X-ray photoelectron spectroscopy (XPS), Rutherford backscattering spectrometry (RBS), wavelength dispersive X-ray spectroscopy (WDS) and energy dispersive X-ray spectroscopy (EDS). XPS and EDS show an underestimation in carbon concentration compared to RBS and WDS which provide similar values. This underestimation is more important in case of XPS and it is mainly attributed to the presence of oxygen contamination on the surface of the films strongly bonded to titanium.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2014

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface & coatings technology

ISSN

0257-8972

e-ISSN

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Svazek periodika

256

Číslo periodika v rámci svazku

October

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

6

Strana od-do

41-46

Kód UT WoS článku

000343349600008

EID výsledku v databázi Scopus

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