Probing the structure and the hardness of titanium/carbon nanocomposite coatings deposited by hybrid PVD/PECVD process

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F12%3A00061366" target="_blank" >RIV/00216224:14310/12:00061366 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Probing the structure and the hardness of titanium/carbon nanocomposite coatings deposited by hybrid PVD/PECVD process

Popis výsledku v původním jazyce

Titanium/carbon nanocomposite hard coatings, which consist of TiC nanoparticles buried in an amorphous carbon matrix, have been prepared by a hybrid plasma process combining magnetron sputtering of a titanium target and plasma enhanced chemical vapor deposition using methane as a source for amorphous carbon. The chemical composition of the bulk has been determined by Rutherford backscattered spectroscopy, and wavelength dispersive X-ray spectroscopy. The surface composition has been evaluated by X-ray photoelectron spectroscopy before and after argon ion erosion. Bulk and surface analysis techniques did not provide the same results. The origin of these differences is discussed in details. Moreover, the structure of the coatings has been extensively probed by transmission electron microscopy, which has shown that when increasing the carbon content within the coating the size of the TiC nanoparticles shrinks.

Název v anglickém jazyce

Probing the structure and the hardness of titanium/carbon nanocomposite coatings deposited by hybrid PVD/PECVD process

Popis výsledku anglicky

Titanium/carbon nanocomposite hard coatings, which consist of TiC nanoparticles buried in an amorphous carbon matrix, have been prepared by a hybrid plasma process combining magnetron sputtering of a titanium target and plasma enhanced chemical vapor deposition using methane as a source for amorphous carbon. The chemical composition of the bulk has been determined by Rutherford backscattered spectroscopy, and wavelength dispersive X-ray spectroscopy. The surface composition has been evaluated by X-ray photoelectron spectroscopy before and after argon ion erosion. Bulk and surface analysis techniques did not provide the same results. The origin of these differences is discussed in details. Moreover, the structure of the coatings has been extensively probed by transmission electron microscopy, which has shown that when increasing the carbon content within the coating the size of the TiC nanoparticles shrinks.

Druh

O - Ostatní výsledky

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

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Návaznosti

V - Vyzkumna aktivita podporovana z jinych verejnych zdroju

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů