Hybridní ICP-naprašování nanokompozitních vrstev TiC/CaO pro biomedicínské aplikace.

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21460%2F06%3A12117676" target="_blank" >RIV/68407700:21460/06:12117676 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Hybrid ICP/Sputter Deposition of TiC/CaO Nanocomposite Films for Biomedical Application

Popis výsledku v původním jazyce

TiC/a-C nanocomposite films doped with CaO have been deposited by means of a hybrid PVD/PACVD technique, which combines dc magnetron sputtering of a TiC0.5+10%?CaO target, with a subsequent high density inductively coupled plasma (ICP) in order to exciteand ionize the sputtered species to a high degree. The films were characterized according to their morphology, structure and thickness by scanning electron microscopy, their composition and bonding structure by X-ray photoelectron spectroscopy, and their crystalline properties by X-ray diffraction. The films consist of fcc titanium carbide nanocrystallites with grain sizes of 5-15 nm and an amorphous carbon phase. The average composition is Ti0.43C0.35Ca0.02O0.15N0.05. The influence of the ICP plasma power and the bias voltage applied to the substrate on the major film properties has been investigated.

Název v anglickém jazyce

Hybrid ICP/Sputter Deposition of TiC/CaO Nanocomposite Films for Biomedical Application

Popis výsledku anglicky

TiC/a-C nanocomposite films doped with CaO have been deposited by means of a hybrid PVD/PACVD technique, which combines dc magnetron sputtering of a TiC0.5+10%?CaO target, with a subsequent high density inductively coupled plasma (ICP) in order to exciteand ionize the sputtered species to a high degree. The films were characterized according to their morphology, structure and thickness by scanning electron microscopy, their composition and bonding structure by X-ray photoelectron spectroscopy, and their crystalline properties by X-ray diffraction. The films consist of fcc titanium carbide nanocrystallites with grain sizes of 5-15 nm and an amorphous carbon phase. The average composition is Ti0.43C0.35Ca0.02O0.15N0.05. The influence of the ICP plasma power and the bias voltage applied to the substrate on the major film properties has been investigated.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2006

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Applied Physics A: Materials Science and Processing

ISSN

0947-8396

e-ISSN

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Svazek periodika

82

Číslo periodika v rámci svazku

3

Stát vydavatele periodika

DE - Spolková republika Německo

Počet stran výsledku

5

Strana od-do

503-507

Kód UT WoS článku

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EID výsledku v databázi Scopus

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