Influence of the target composition on reactively sputtered titanium oxide films

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F09%3A00156659" target="_blank" >RIV/68407700:21230/09:00156659 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Influence of the target composition on reactively sputtered titanium oxide films

Popis výsledku v původním jazyce

Titanium dioxide thin films have many interesting properties and are used in various applications. High refractive index of titania makes it attractive for the glass coating industry, where it is used in low-emission and antireflective coatings. Magnetron sputtering is the most common deposition technique for large area coatings. It has been shown previously that high rate can be achieved using substoichiometric targets TiOx. This work deals with reactive magnetron sputtering of titanium oxide films from targets of different composition. The DC deposition process with targets of different oxygen content has been investigated. The deposition rate and hysteresis behaviour is reported. The elemental compositions and structures of deposited films were evaluated by means of X-ray photoelectron spectroscopy, elastic recoil detection analysis and X-ray diffraction.

Název v anglickém jazyce

Influence of the target composition on reactively sputtered titanium oxide films

Popis výsledku anglicky

Titanium dioxide thin films have many interesting properties and are used in various applications. High refractive index of titania makes it attractive for the glass coating industry, where it is used in low-emission and antireflective coatings. Magnetron sputtering is the most common deposition technique for large area coatings. It has been shown previously that high rate can be achieved using substoichiometric targets TiOx. This work deals with reactive magnetron sputtering of titanium oxide films from targets of different composition. The DC deposition process with targets of different oxygen content has been investigated. The deposition rate and hysteresis behaviour is reported. The elemental compositions and structures of deposited films were evaluated by means of X-ray photoelectron spectroscopy, elastic recoil detection analysis and X-ray diffraction.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

JJ - Ostatní materiály

OECD FORD obor

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Projekt

<a href="/cs/project/GP106%2F07%2FP014" target="_blank" >GP106/07/P014: Samomazné vrstvy na bázi dichalkogenidů přechodových kovů</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2009

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Vacuum

ISSN

0042-207X

e-ISSN

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Svazek periodika

83

Číslo periodika v rámci svazku

10

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

4

Strana od-do

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Kód UT WoS článku

000267505100022

EID výsledku v databázi Scopus

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